Passivation and dissolution mechanisms in ordered anodic tantalum oxide nanostructures

Abstract Tantalum oxide (Ta2O5) nanostructures exhibit outstanding electrical and optical properties, as well as, high chemical resistance and stability. These materials have great potential for biomedical, catalysis, semiconductors and energy applications due to their large surface area and high specific charge, when arranged in nanoporous or nanotubular morphologies. In order to obtain these structures, an anodization process, which is inexpensive, reproducible and easy to scale up, is used. Yet, depending on the anodization conditions, the formation of a nanoporous or nanotubular layer is difficult to stabilize during the anodization process. In this regard, anodized tantalum oxide nanostructures were produced to understand the effect of the anodization conditions, including electrolyte concentration, potential and time. The nanopores or nanotubes morphologies, their chemical composition and structure were investigated by FIB-SEM, double-corrected TEM-STEM and EDS. We found that it is necessary to have high acid concentrations (mixture of H2SO4 with HF) to be able to form nanoporous or nanotubular structures. Despite the capacity of HF to dissolve and create anodic oxide nanostructures, the amount of H2SO4 concentration in the mixture is very important, leading to a dimple morphology. Furthermore, the increase of the anodization potential/electrical field clearly leads to an increase in the dimples diameter.