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APPLIED SURFACE SCIENCE
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Antireflective coatings (ARCs) with low reflectance and high transmittance are increasingly important in display and optoelectronic devices to improve visibility and energy efficiency. However, conventional ARC fabrication methods often involve complex procedures and high costs, and poor moisture stability limits outdoor use. In this study, a cost-effective and scalable spin-co…
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This study elucidates the physical mechanisms governing growth mode transitions in (100) β-Ga2O3 MOCVD homoepitaxy when replacing Ar with N2 carrier gas. Ar promotes step-flow growth with RMS roughness of 0.209 nm and no twin defects. N2 triggers 2D island nucleation, generating extensive twin boundaries and increasing roughness to 1.545 nm. Integrating boundary-layer mass-tran…
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