journal article·2014-10

Electrical, electronic and optical properties of amorphous indium zinc tin oxide thin films

Yus Rama Denny, Kangil Lee, Soonjoo Seo, Suhk Kun Oh, Hee Jae Kang, Dong Seok Yang, Sung Heo, Jae Gwan Chung, Jae Cheol Lee

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Abstract

Abstract The electrical and optical properties of amorphous indium zinc tin oxide (a-IZTO) thin films were examined as a function of chemical composition. Effects of Sn/Zn composition ratio and In content on the electrical and optical properties of a-IZTO thin films are discussed. The electron mobility of thin film transistors with higher Sn/Zn composition ratio was dramatically improved due to a shorter zinc–zinc separation distance. The thin film transistor with the composition of In:Zn:Sn = 20:48:32 exhibits a high mobility of 30.6 cm 2 V −1 s −1 and a high on–off current ratio of 10 9 .
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Research context

OpenAlex topics: ZnO doping and properties · Thin-Film Transistor Technologies · Gas Sensing Nanomaterials and Sensors

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

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