Inductively coupled plasma etching of III–V semiconductors in BCl3-based chemistries

journal article·1999-04

T Maeda, J.W Lee, R.J Shul, J Han, J Hong, E.S Lambers, S.J Pearton, C.R Abernathy, W.S Hobson

Applied Surface Science· Volume 143· Issue 1-4

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OpenAlex topics: Semiconductor materials and devices · Nanowire Synthesis and Applications · Semiconductor Quantum Structures and Devices

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