ZnS/Ag/ZnS nano-multilayer films for transparent electrodes in flat display application

Abstract In this paper, ZnS/Ag/ZnS nano-multilayers for transparent electrodes in flat display application have been prepared by thermal evaporation in vacuum. The sheet resistance of the films was low as 3 Ω/cm2. And they can be applied as good selective filters with the luminous transmittance Tlum about 90% and IR reflectance above 90%. The merit FTC for revaluing transparent electrodes reached 7.3×10 −2 Ω −1 at 550 nm wavelength. Among the prepared films, some extreme asymmetrical structures having good performances were firstly reported. The influence of thickness of layers on the optic and electrical performance and thermal stability of multilayers was analyzed. Spectroscopic ellipsometry analysis indicated that the interlayers between Ag and ZnS layer contained a physical mixture layer and a compound semiconductor layer. After heat treatment, there existed a vulcanized Ag layer and the further diffusion and chemical combination between layers, which reduced the transmittance and the conductivity of the whole system.