Fabrication and characterization of (Ba, Sr)RuO3 ceramic targets and thin films for ferroelectric BaTiO3 thin-film capacitors
Source abstract
Abstract
We report the preparation of (Ba, Sr)RuO3 ceramic targets in a conventional process in air at ambient pressure and their epitaxial thin-film growth on Ba0.7Sr0.3TiO3 buffered SrTiO3 substrates. We found that a simultaneous addition of CuO and SiO2 is effective in obtaining the relatively dense ceramics. The microstructural and chemical investigations show that the synergetic effect of a liquid-phase (Ba-Sr-O) assisted grain growth accelerated by Cu-derived Ru charge inhomogeneity along with a rearrangement of grains promoted by a liquid-phase silicate is the mechanism of the (Ba, Sr)RuO3 densification. We demonstrate that all epitaxial BaTiO3 thin-film capacitors with (Ba1−xSrx)RuO3 electrodes can be obtained up to x of 0.6.
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Research context
OpenAlex topics: Ferroelectric and Piezoelectric Materials · Multiferroics and related materials · Electronic and Structural Properties of Oxides
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Applied Chemistry, School of Engineering, The University of Tokyo 1 , 7-3-1 Hongo, Bunkyo-Ku, Tokyo 113-8656, Japan
Technical Department, Tokyo Institute of Technology 2 , 2-12-1 Ookayama, Meguro-Ku, Tokyo 152-8552, Japan
Funding
Japan Society for the Promotion of Science
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