journal article·2014-12-01Open access

Metal-insulator-transition in SrTiO3 induced by argon bombardment combined with field effect

Jie Xu, Zhengyong Zhu, Hengliang Zhao, Zhijiong Luo

AIP Advances· Volume 4· Issue 12

Abstract

By fabricating the Field-Effect-Transistors on argon bombardment SrTiO3 substrates, not only we have achieved one of the best mobility for Field-Effect-Transistors fabricated on SrTiO3, but also realized strong field induced Metal-Insulator-Transition. The critical sheet resistance for the Metal-Insulator-Transition is only 1/7 of the value obtained in the former experiments, indicating a different mechanism. Further study shows that the Metal-Insulator-Transition can be attributed to the oxygen vacancies formed after the bombardment becoming the electron donor under the electric field modulation, increasing SrTiO3 surface electron density and transforming the substrate into metallic state.
Source: crossref · Quality: baseline

Research context

OpenAlex topics: Electronic and Structural Properties of Oxides · Semiconductor materials and devices · Magnetic and transport properties of perovskites and related materials

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Integrated Circuit Advanced Process Center, Chinese Academy of Sciences , Beijing, 100029, China

References (18)

Show source-provided references
1. Science · 2007 · 315 · 137710.1126/science.1138578 ↗
2. Nature · 2004 · 427 · 42310.1038/nature02308 ↗
3. Nature Mater. · 2008 · 7 · 29810.1038/nmat2136 ↗
4. Rev. Mod. Phys. · 1998 · 70 · 103910.1103/RevModPhys.70.1039 ↗
5. Appl. Phys. Lett. · 2003 · 83 · 175510.1063/1.1605806 ↗
6. J. Appl. Phys. · 2007 · 102 · 08371310.1063/1.2801383 ↗
7. Appl. Phys. Lett. · 2004 · 85 · 42510.1063/1.1773361 ↗
8. Appl. Phys. Lett. · 2006 · 88 · 21211610.1063/1.2207502 ↗
9. Appl. Phys. Lett. · 2009 · 95 · 11350510.1063/1.3231873 ↗
10. Electron. Device. Letters. · 2013 · 34 · 710.1109/LED.2013.2260820 ↗
11. Phys. Rev. B · 2010 · 81 · 14410910.1103/PhysRevB.81.144109 ↗
12. Appl. Phys. Lett. · 2011 · 99 · 17210310.1063/1.3656703 ↗
13. J. Phys. C · 1974 · 710.1088/0022-3719/7/15/003 ↗
14. Phys. Rev. Lett. · 2001 · 87 · 26640210.1103/PhysRevLett.87.266402 ↗
15. J. Phys. Soc. Jpn. · 2006 · 75 · 02370310.1143/JPSJ.75.023703 ↗
16. Nature Material. · 2005 · 4 · 81610.1038/nmat1498 ↗
17. J. Appl. Phys. · 2003 · 93 · 452110.1063/1.1562001 ↗
18. Appl. Phys. Lett. · 2003 · 82 · 20310.1063/1.1536247 ↗