journal article·2021-04-01Open access

Doping-less tunnel field-effect transistors by compact Si drain frame/Si0.6Ge0.4-channel/Ge source

Byoung-Seok Lee, Min-Won Kim, Ji-Hun Kim, Sang-Dong Yoo, Tae-Hun Shim, Jin-Pyo Hong, Jea-Gun Park

AIP Advances· Volume 11· Issue 4

Abstract

Tunnel field-effect transistors (TFETs) have attracted immense interest as a promising alternative to complementary metal–oxide semiconductors for low-power-consumption applications. However, conventional TFETs introduce both random dopant fluctuations and ambipolar current issues at negative gate voltages for sub-6-nm technology nodes. In this study, we address the performance of charge plasma-driven doping-less TFETs, including sub-3-nm thick compact drain (CD) geometry/SiGe-channel/Ge source layers for suitable bandgap engineering. An ultrathin CD frame and heteromaterials are adopted for use as channels/sources to improve the ambipolarity and ON-state features, respectively. Simulation demonstrates a clear reduction in the ambipolar current from 3.3 × 10−14 to 3.0 × 10−17 A at gate (VG)/drain (VD) voltages of −1.5/1.0 V and an enhancement in the ON-current from 2.0 × 10−5 to 8.6 × 10−5 A at VG = 1.5 and VD = 1.0 V, compared with conventional TFETs. In addition, diverse fabrication-friendly metals applicable to industry fieldwork sites are tested to determine how the metal work functions influence the outputs. The use of Ti/W/Ni as the drain/channel/source materials, respectively, yields an enhanced ambipolar current of 1.2 × 10−20 A and an ON-current of 3.9 × 10−5 A.
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Research context

OpenAlex topics: Semiconductor materials and devices · Advancements in Semiconductor Devices and Circuit Design · Integrated Circuits and Semiconductor Failure Analysis

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

R&D Division, SK Hynix, Inc. 1 , 2091 Gyeonchung-daero, Bubal-eub, Icheon-si, Gyeonggi-do 17336, Republic of Korea

Department of Electronics and Computer Engineering, Hanyang University 2 , 222, Wangsimni-ro, Seongdong-gu, Seoul 04763, Republic of Korea

Advanced Semiconductor Materials and Devices Development Center, Hanyang University 3 , 222, Wangsimni-ro, Seongdong-gu, Seoul 04763, Republic of Korea

Department of Nano-scale Semiconductor Engineering, Hanyang University 4 , 222, Wangsimni-ro, Seongdong-gu, Seoul 04763, Republic of Korea

Department of Physics, Hanyang University 5 , 222, Wangsimni-ro, Seongdong-gu, Seoul 04763, Republic of Korea

Funding

Ministry of Trade, Industry and Energy

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