Strain-based room-temperature non-volatile MoTe2 ferroelectric phase change transistor
Source abstract
Abstract
The primary mechanism of operation of almost all transistors today relies on the electric-field effect in a semiconducting channel to tune its conductivity from the conducting 'on' state to a non-conducting 'off' state. As transistors continue to scale down to increase computational performance, physical limitations from nanoscale field-effect operation begin to cause undesirable current leakage, which is detrimental to the continued advancement of computing1,2. Using a fundamentally different mechanism of operation, we show that through nanoscale strain engineering with thin films and ferroelectrics the transition metal dichalcogenide MoTe2 can be reversibly switched with electric-field-induced strain between the 1T'-MoTe2 (semimetallic) phase to a semiconducting MoTe2 phase in a field-effect transistor geometry. This alternative mechanism for transistor switching sidesteps all the static and dynamic power consumption problems in conventional field-effect transistors3,4. Using strain, we achieve large non-volatile changes in channel conductivity (Gon/Goff ≈ 107 versus Gon/Goff ≈ 0.04 in the control device) at room temperature. Ferroelectric devices offer the potential to reach sub-nanosecond non-volatile strain switching at the attojoule/bit level5-7, with immediate applications in ultrafast low-power non-volatile logic and memory8 while also transforming the landscape of computational architectures because conventional power, speed and volatility considerations for microelectronics may no longer exist.
Source: europepmc · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Ferroelectric and Negative Capacitance Devices · 2D Materials and Applications · Advanced Memory and Neural Computing
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (33)
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1. Zhirnov, V. V. & Cavin, R. K. Nanoelectronics: negative capacitance to the rescue? Nat. Nanotechnol. 3, 77–78 (2008).10.1038/nnano.2008.18 ↗
2. Cheung, K. P. On the 60 mV/dec @300 K limit for MOSFET subthreshold swing. In Proceedings of 2010 International Symposium on VLSI Technology, System and Application 72–73 (IEEE, 2010).10.1109/VTSA.2010.5488941 ↗
3. Frank, D. J. et al. Device scaling limits of Si MOSFETs and their application dependencies. Proc. IEEE 89, 259–288 (2001).10.1109/5.915374 ↗
4. Pimbley, J. M. & Meindl, J. D. MOSFET scaling limits determined by subthreshold conduction. IEEE Trans. Electron Devices 36, 1711–1721 (1989).10.1109/16.34233 ↗
5. Muller, J., Polakowski, P., Mueller, S. & Mikolajick, T. Ferroelectric hafnium oxide based materials and devices: assessment of current status and future prospects. ECS J. Solid State Sci. Technol. 4, N30–N35 (2015).10.1149/2.0081505jss ↗
6. Hong, X. Emerging ferroelectric transistors with nanoscale channel materials: the possibilities, the limitations. J. Phys. Condens. Matter 28, 103003 (2016).10.1088/0953-8984/28/10/103003 ↗
7. Manipatruni, S. et al. Scalable energy-efficient magnetoelectric spin–orbit logic. Nature 565, 35–42 (2019).10.1038/s41586-018-0770-2 ↗
8. Chen, A. A review of emerging non-volatile memory (NVM) technologies and applications. Solid State Electron. 125, 25–38 (2016).10.1016/j.sse.2016.07.006 ↗
9. Lee, M. L., Fitzgerald, E. A., Bulsara, M. T., Currie, M. T. & Lochtefeld, A. Strained Si, SiGe and Ge channels for high-mobility metal-oxide-semiconductor field-effect transistors. J. Appl. Phys. 97, 011101 (2005).10.1063/1.1819976 ↗
10. Okino, H., Sakamoto, J. & Yamamoto, T. Cooling-rate-dependence of dielectric constant and domain structures in (1 − x)Pb(Mg1/3Nb2/3)O3–xPbTiO3 single crystals. Jpn J. Appl. Phys. 44, 7160–7164 (2005).10.1143/JJAP.44.7160 ↗
11. Genenko, Y. A., Glaum, J. & Hoffmann, M. J. Mechanisms of aging and fatigue in ferroelectrics. Mater. Sci. Eng. B 192, 52–82 (2015).10.1016/j.mseb.2014.10.003 ↗
12. Arlt, G. & Neumann, H. Internal bias in ferroelectric ceramics: origin and time dependence. Ferroelectrics 87, 109–120 (1988).10.1080/00150198808201374 ↗
13. Damodaran, A. R., Breckenfeld, E., Chen, Z., Lee, S. & Martin, L. W. Enhancement of ferroelectric Curie temperature in BaTiO3 films via strain-induced defect dipole alignment. Adv. Mater. 26, 6341–6347 (2014).10.1002/adma.201400254 ↗
14. Buzzi, M. et al. Single domain spin manipulation by electric fields in strain coupled artificial multiferroic nanostructures. Phys. Rev. Lett. 111, 027204 (2013).10.1103/PhysRevLett.111.027204 ↗
15. Du, H., Xue, T., Xu, C., Kang, Y. & Dou, W. Improvement of mechanical properties of graphene/substrate interface via regulation of initial strain through cyclic loading. Opt. Lasers Eng. 110, 356–363 (2018).10.1016/j.optlaseng.2018.04.026 ↗
16. Cho, S. et al. Phase patterning for ohmic homojunction contact in MoTe2. Science 349, 625–628 (2015).10.1126/science.aab3175 ↗
17. Lin, Y.-F. et al. Ambipolar MoTe2 transistors and their applications in logic circuits. Adv. Mater. 26, 3263–3269 (2014).10.1002/adma.201305845 ↗
18. Qu, D. et al. Carrier-type modulation and mobility improvement of thin MoTe 2. Adv. Mater. 29, 1606433 (2017).10.1002/adma.201606433 ↗
19. Fathipour, S. et al. Exfoliated multilayer MoTe2 field-effect transistors. Appl. Phys. Lett. 105, 192101 (2014).10.1063/1.4901527 ↗
20. Duerloo, K.-A. N., Li, Y., Reed, E. J., Scuseria, G. E. & Heinz, T. F. Structural phase transitions in two-dimensional Mo- and W-dichalcogenide monolayers. Nat. Commun. 5, 4214 (2014).10.1038/ncomms5214 ↗
21. Song, S. et al. Room temperature semiconductor-metal transition of MoTe2 thin films engineered by strain. Nano Lett. 16, 188–193 (2016).10.1021/acs.nanolett.5b03481 ↗
22. Wu, T. et al. Domain engineered switchable strain states in ferroelectric (011) [Pb(Mg1/3Nb2/3)O3](1 - x)-[PbTiO3]x (PMN-PT, x ≈ 0.32) single crystals. J. Appl. Phys. 109, 124101 (2011).10.1063/1.3595670 ↗
23. Yang, L. et al. Bipolar loop-like non-volatile strain in the (001)-oriented Pb(Mg1/3Nb2/3)O3-PbTiO3 single crystals. Sci. Rep. 4, 4591 (2015).10.1038/srep04591 ↗
24. Pesic, M. et al. Built-in bias generation in anti-ferroelectric stacks: methods and device applications. IEEE J. Electron. Devices Soc. 6, 1019–1025 (2018).10.1109/JEDS.2018.2825360 ↗
25. Li, X., Wu, M., Xu, B., Liu, R. & Ouyang, C. Compressive strain induced dynamical stability of monolayer 1T-MX2 (M = Mo, W; X = S, Se). Mater. Res. Express 4, 115018 (2017).10.1088/2053-1591/aa9762 ↗
26. Vermeulen, P. A., Mulder, J., Momand, J. & Kooi, B. J. Strain engineering of van der Waals heterostructures. Nanoscale 10, 1474–1480 (2018).10.1039/C7NR07607J ↗
27. Wang, R. et al. 2D or not 2D: strain tuning in weakly coupled heterostructures. Adv. Funct. Mater. 28, 1705901 (2018).10.1002/adfm.201705901 ↗
28. Kumar, H., Dong, L. & Shenoy, V. B. Limits of coherency and strain transfer in flexible 2D van der Waals heterostructures: formation of strain solitons and interlayer debonding. Sci. Rep. 6, 21516 (2016).10.1038/srep21516 ↗
29. Zhang, F. et al. Electric-field induced structural transition in vertical MoTe2- and Mo1-xWxTe2-based resistive memories. Nat. Mater. 18, 55–61 (2019).10.1038/s41563-018-0234-y ↗
30. Kalikka, J. et al. Strain-engineered diffusive atomic switching in two-dimensional crystals. Nat. Commun. 7, 11983 (2016).10.1038/ncomms11983 ↗
31. Manchanda, P., Sharma, V., Yu, H., Sellmyer, D. J. & Skomski, R. Magnetism of Ta dichalcogenide monolayers tuned by strain and hydrogenation. Appl. Phys. Lett. 107, 032402 (2015).10.1063/1.4927286 ↗
32. Xiang, H. et al. Quantum spin Hall insulator phase in monolayer WTe2 by uniaxial strain. AIP Adv. 6, 095005 (2016).10.1063/1.4962662 ↗
33. Ge, Y., Wan, W., Yang, F. & Yao, Y. The strain effect on superconductivity in phosphorene: a first-principles prediction. New J. Phys. 17, 035008 (2015).10.1088/1367-2630/17/3/035008 ↗