journal article·2012-12

High-density integration of carbon nanotubes via chemical self-assembly

Hongsik Park, Ali Afzali, Shu-Jen Han, George S. Tulevski, Aaron D. Franklin, Jerry Tersoff, James B. Hannon, Wilfried Haensch

Nature Nanotechnology· Volume 7· Issue 12
Publisher page

Abstract

Carbon nanotubes have potential in the development of high-speed and power-efficient logic applications. However, for such technologies to be viable, a high density of semiconducting nanotubes must be placed at precise locations on a substrate. Here, we show that ion-exchange chemistry can be used to fabricate arrays of individually positioned carbon nanotubes with a density as high as 1 × 10(9) cm(-2)-two orders of magnitude higher than previous reports. With this approach, we assembled a high density of carbon-nanotube transistors in a conventional semiconductor fabrication line and then electrically tested more than 10,000 devices in a single chip. The ability to characterize such large distributions of nanotube devices is crucial for analysing transistor performance, yield and semiconducting nanotube purity.
Source: europepmc · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Carbon Nanotubes in Composites · Nanopore and Nanochannel Transport Studies · Graphene research and applications

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (29)

Show source-provided references
1. Kreupl, F. Carbon nanotubes finally deliver. Nature 484, 321–322 (2012).10.1038/484321a ↗
2. Javey, A., Guo, J., Lundstrom, M. & Dai, H. Ballistic carbon nanotube field-effect transistors. Nature 424, 654–657 (2003).10.1038/nature01797 ↗
3. Appenzeller, J. Carbon nanotubes for high-performance electronics—progress and prospect. Proc. IEEE 96, 201–211 (2008).10.1109/JPROC.2007.911051 ↗
4. Avouris, P. & Martel, R. Progress in carbon nanotube electronics and photonics. Mater. Res. Soc. Bull. 35, 306–313 (2010).10.1557/mrs2010.553 ↗
5. Franklin, A. D. & Chen, Z. Length scaling of carbon nanotube transistors. Nature Nanotech. 5, 858–862 (2010).10.1038/nnano.2010.220 ↗
6. Franklin, A. D. et al. Sub-10 nm carbon nanotube transistor. Nano Lett. 12, 758–762 (2012).10.1021/nl203701g ↗
7. Patil, N., Deng, J., Mitra, S. & Wong, H-S. P. Circuit-level performance benchmarking and scalability analysis of carbon nanotube transistor circuits. IEEE Trans. Nanotechnol. 8, 37–45 (2009).10.1109/TNANO.2008.2006903 ↗
8. Rao, S. G., Huang, L., Setyawan, W. & Hong, S. Large-scale assembly of carbon nanotubes. Nature 425, 36–37 (2003).10.1038/425036a ↗
9. Vijayaraghavan, A. et al. Ultra-large-scale directed assembly of single-walled carbon nanotube devices. Nano Lett. 7, 1556–1560 (2007).10.1021/nl0703727 ↗
10. Oh, B. S. et al. Fabrication of suspended single-walled carbon nanotubes via a direct lithographic route. J. Mater. Chem. 16, 174–178 (2006).10.1039/B510742C ↗
11. Papadopoulos, C. & Omrane, B. Nanometer-scale catalyst patterning for controlled growth of individual single-walled carbon nanotubes. Adv. Mater. 20, 1344–1347 (2008).10.1002/adma.200701881 ↗
12. Wang, Y. et al. Controlling the shape, orientation, and linkage of carbon nanotube features with nano affinity templates. Proc. Natl Acad. Sci. USA 103, 2026–2031 (2006).10.1073/pnas.0511022103 ↗
13. Duchamp, M. et al. Controlled positioning of carbon nanotubes by dielectrophoresis: insights into the solvent and substrate role. ACS Nano 4, 279–284 (2010).10.1021/nn901559q ↗
14. Hannon, J. B., Afzali, A., Klinke, C. & Avouris, Ph. Selective placement of carbon nanotubes on metal-oxide surfaces. Langmuir 21, 8569–8571 (2005).10.1021/la050799y ↗
15. Lee, M. et al. Linker-free directed assembly of high-performance integrated devices based on nanotubes and nanowires. Nature Nanotech. 1, 66–77 (2006).10.1038/nnano.2006.46 ↗
16. Bardeccker, J. A. et al. Directed assembly of single-walled carbon nanotubes via drop-casting onto a UV-patterned photosensitive monolayer. J. Am. Chem. Soc. 130, 7226–7227 (2008).10.1021/ja802407f ↗
17. Klinke, C., Hannon, J. B., Afzali, A. & Avouris, Ph. Field-effect transistors assembled from functionalized carbon nanotubes. Nano Lett. 6, 906–910 (2006).10.1021/nl052473f ↗
18. Tulevski, G. S. et al. Chemically assisted directed assembly of carbon nanotubes for the fabrication of large-scale device arrays. J. Am. Chem. Soc. 129, 11964–11968 (2007).10.1021/ja073647t ↗
19. Gomez, L. M. et al. Scalable light-induced metal to semiconductor conversion of carbon nanotubes. Nano Lett. 9, 3592–3598 (2009).10.1021/nl901802m ↗
20. Ono, Y., Kishimoto, S., Ohno, Y. & Mizutani, T. Thin film transistors using PECVD-grown carbon nanotubes. Nanotechnology 21, 205202 (2010).10.1088/0957-4484/21/20/205202 ↗
21. Arnold, M. S., Green, A. A., Hulvat, J. F., Stupp, S. I. & Hersam, M. C. Sorting carbon nanotubes by electronic structure using density differentiation. Nature Nanotech. 1, 60–65 (2006).10.1038/nnano.2006.52 ↗
22. Folkers, J. P., Gorman, C. B., Laibinis, P. E., Buchholz, S. & Whitesides, G. M. Self-assembled monolayers of long-chain hydroxamic acids on the native oxides of metals. Langmuir 11, 813–824 (1995).10.1021/la00003a024 ↗
23. Franklin, A. D. et al. Variability in carbon nanotube transistors: improving device-to-device consistency. ACS Nano 6, 1109–1115 (2012).10.1021/nn203516z ↗
24. Engel, M. et al. Thin film nanotube transistors based on self-assembled, aligned, semiconducting carbon nanotube arrays. ACS Nano 2, 2445–2452 (2008).10.1021/nn800708w ↗
25. Stokes, P. & Khondaker, S. I. High quality solution processed carbon nanotube transistors assembled by dielectrophoresis. Appl. Phys. Lett. 96, 083110 (2010).10.1063/1.3327521 ↗
26. Tseng, Y., Phoa, K., Carlton, D. & Bokor, J. Effect of diameter variation in a large set of carbon nanotube transistors. Nano Lett. 6, 1364–1368 (2006).10.1021/nl060305x ↗
27. Park, S. et al. Highly effective separation of semiconducting carbon nanotubes verified via short-channel devices fabricated using dip-pen nanolithography. ACS Nano 6, 2487–2496 (2012).10.1021/nn204875a ↗
28. Ho, C. Y., Strobel, E., Ralbovsky, J. & Galemmo, R. A. Jr Improved solution- and solid-phase preparation of hydroxamic acids from esters. J. Org. Chem. 70, 4873–4875 (2005).10.1021/jo050036f ↗
29. Moshammer, K., Hennrich, F. & Kappes, M. M. Selective suspension in aqueous sodium dodecyl sulfate according to electronic structure type allows simple separation of metallic from semiconducting single-walled carbon nanotubes. Nano Res. 2, 599–606 (2009).10.1007/s12274-009-9057-0 ↗