DataVXACS Applied Materials & InterfacesPaper
journal article·2024-08-14

Flexible Nanoscale Amorphous Oxide Transistors with a Gold-Assisted Transfer Method

Sumaiya Wahid, Alwin Daus, Victoria Chen, Eric Pop

ACS Applied Materials & Interfaces· Volume 16· Issue 32
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Source abstract

Abstract

We present a new approach to achieve nanoscale transistors on ultrathin flexible substrates with conventional electron-beam lithography. Full devices are first fabricated on a gold sacrificial layer covering a rigid silicon substrate, and then coated with a polyimide film and released from the rigid substrate. This approach bypasses nanofabrication constraints on flexible substrates: (i) electron-beam surface charging, (ii) alignment inaccuracy due to the wavy substrate, and (iii) restricted thermal budgets. As a proof-of-concept, we demonstrate ∼100 nm long indium tin oxide (ITO) transistors on ∼6 μm thin polyimide. This is achieved with sub-20 nm misalignment or overlap between source (or drain) and gate contacts on flexible substrates for the first time. The estimated transit frequency of our well-aligned devices can be up to 3.3 GHz, which can be further improved by optimizing the device structure and performance.
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Research context

NanomaterialsElectronic materials

OpenAlex topics: Thin-Film Transistor Technologies · Semiconductor materials and devices · Advanced Memory and Neural Computing

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Electrical Engineering, Stanford University, Stanford, California 94305, United States

Department of Microsystems Engineering (IMTEK), University of Freiburg, 79110 Freiburg, Germany

Department of Applied Physics, Stanford University, Stanford, California 94305, United States

Department of Materials Science and Engineering, Stanford University, Stanford, California 94305, United States

SLAC National Accelerator Laboratory, Menlo Park, California 94025, United States

Funding

Stanford University · Semiconductor Research Corporation · Division of Electrical, Communications and Cyber Systems · Stanford Precourt Institute for Energy · Stanford SystemX Alliance

References (19)

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