DataVXACS Applied Materials & InterfacesPaper
journal article·2017-12-06Open access

Silicon Nanomembranes with Hybrid Crystal Orientations and Strain States

Shelley A. Scott, Christoph Deneke, Deborah M. Paskiewicz, Hyuk Ju Ryu, Angelo Malachias, Stefan Baunack, Oliver G. Schmidt, Donald E. Savage, Mark A. Eriksson, Max G. Lagally

ACS Applied Materials & Interfaces· Volume 9· Issue 48
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Source abstract

Abstract

Methods to integrate different crystal orientations, strain states, and compositions of semiconductors in planar and preferably flexible configurations may enable nontraditional sensing-, stimulating-, or communication-device applications. We combine crystalline-silicon nanomembranes, patterning, membrane transfer, and epitaxial growth to demonstrate planar arrays of different orientations and strain states of Si in a single membrane, which is then readily transferable to other substrates, including flexible supports. As examples, regions of Si(001) and Si(110) or strained Si(110) are combined to form a multicomponent, single substrate with high-quality narrow interfaces. We perform extensive structural characterization of all interfaces and measure charge-carrier mobilities in different regions of a 2D quilt. The method is readily extendable to include varying compositions or different classes of materials.
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Research context

NanomaterialsElectronic materials

OpenAlex topics: Nanowire Synthesis and Applications · Advanced MEMS and NEMS Technologies · Advanced Sensor and Energy Harvesting Materials

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

University of Wisconsin, Madison, Wisconsin 53706, United States

Laboratoria Nacional de Nanotechnologia, Centro Nacional de Pesquisa em Energia e Materiais, 13083-100 Campinas, Brazil

IFW Dresden, Helmholtzstrasse 20, D-01069 Dresden, Germany

Instituto de Física “Gleb Wataghin”, Universidade Estadual de Campinas (Unicamp), 13083-859 Campinas, São Paulo, Brazil

Universidade Federal de Minas Gerais, CP 702, 30123-970 Belo Horizonte, Brazil

Funding

Basic Energy Sciences · Conselho Nacional de Desenvolvimento Cient?fico e Tecnol?gico · U.S. Department of Defense · Funda??o de Amparo ? Pesquisa do Estado de S?o Paulo · National Science Foundation

References (42)

Show source-provided references
1. 10.1063/1.273056110.1063/1.2730561 ↗
2. 10.1088/0268-1242/12/12/00110.1088/0268-1242/12/12/001 ↗
3. 10.1063/1.158512010.1063/1.1585120 ↗
4. 10.1109/TED.2006.87269310.1109/TED.2006.872693 ↗
5. 10.1063/1.317640710.1063/1.3176407 ↗
6. 10.1038/nature1038110.1038/nature10381 ↗
7. 10.1021/nn103149c10.1021/nn103149c ↗
8. Freund L. B. · 2003
9. 10.1103/PhysRevLett.102.22610310.1103/PhysRevLett.102.226103 ↗
10. 10.1021/nn304151j10.1021/nn304151j ↗
11. 10.1063/1.491861510.1063/1.4918615 ↗
12. 10.1038/srep0129110.1038/srep01291 ↗
13. 10.1038/srep2477110.1038/srep24771 ↗
14. 10.1088/0022-3727/40/4/R0110.1088/0022-3727/40/4/R01 ↗
15. 10.1038/nmat160610.1038/nmat1606 ↗
16. Lagally, M. G.; Scott, S. A.; Savage, D. E.Nanomembrane Structures Having Mixed Crystalline Orientations and Compositions. U.S. Patent US8803195 B2, Aug. 12, 2014.
17. 10.1103/PhysRevB.4.195010.1103/PhysRevB.4.1950 ↗
18. 10.1109/TED.2005.84389410.1109/TED.2005.843894 ↗
19. 10.1016/j.tsf.2005.07.32810.1016/j.tsf.2005.07.328 ↗
20. 10.1021/nn200967210.1021/nn2009672 ↗
21. 10.1002/admi.20170052910.1002/admi.201700529 ↗
22. 10.1016/j.jcrysgro.2006.06.04310.1016/j.jcrysgro.2006.06.043 ↗
23. 10.1038/nmat153210.1038/nmat1532 ↗
24. 10.1002/adom.20150040210.1002/adom.201500402 ↗
25. 10.3390/photonics204108110.3390/photonics2041081 ↗
26. 10.1021/nl503997m10.1021/nl503997m ↗
27. 10.1016/j.pquantelec.2017.01.00110.1016/j.pquantelec.2017.01.001 ↗
28. 10.1107/S002188980600507310.1107/S0021889806005073 ↗
29. 10.1016/0001-6160(59)90069-010.1016/0001-6160(59)90069-0 ↗
30. 10.1063/1.213879510.1063/1.2138795 ↗
31. 10.1063/1.271754310.1063/1.2717543 ↗
32. 10.1109/IEDM.2003.126932010.1109/IEDM.2003.1269320 ↗
33. Sze S. M. · 2007
34. 10.1063/1.32447710.1063/1.324477 ↗
35. 10.1109/T-ED.1983.2108710.1109/T-ED.1983.21087 ↗
36. 10.1088/1367-2630/9/8/27010.1088/1367-2630/9/8/270 ↗
37. 10.1063/1.34945110.1063/1.349451 ↗
38. 10.1002/adfm.20130316510.1002/adfm.201303165 ↗
39. 10.1021/nn800308p10.1021/nn800308p ↗
40. 10.1063/1.221430110.1063/1.2214301 ↗
41. 10.1109/TED.2007.91483310.1109/TED.2007.914833 ↗
42. Thomas J. · 2008 · 23110.1007/978-3-540-85156-1_116 ↗