journal article·2023-08-02

Engineering Interface Defects and Interdiffusion at the Degenerate Conductive In2O3/Al2O3 Interface for Stable Electrodes in a Saline Solution

Zetao Zhu, Takao Yasui, Xixi Zhao, Quanli Liu, Shu Morita, Yan Li, Akira Yonezu, Kazuki Nagashima, Tsunaki Takahashi, Minoru Osada, Ryotaro Matsuda, Takeshi Yanagida, Yoshinobu Baba

ACS Applied Materials & Interfaces· Volume 15· Issue 30
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Abstract

A low-temperature Al 2 O 3 deposition process provides a simplified method to form a conductive two-dimensional electron gas (2DEG) at the metal oxide/Al 2 O 3 heterointerface. However, the impact of key factors of the interface defects and cation interdiffusion on the interface is still not well understood. Furthermore, there is still a blank space in terms of applications that go beyond the understanding of the interface’s electrical conductivity. In this work, we carried out a systematic experimental study by oxygen plasma pretreatment and thermal annealing post-treatment to study the impact of interface defects and cation interdiffusion at the In 2 O 3 /Al 2 O 3 interface on the electrical conductance, respectively. Combining the trends in electrical conductance with the structural characteristics, we found that building a sharp interface with a high concentration of interface defects provides a reliable approach to producing such a conductive interface. After applying this conductive interface as electrodes for fabricating a field-effect transistor (FET) device, we found that this interface electrode exhibited ultrastability in phosphate-buffered saline (PBS), a commonly used biological saline solution. This study provides new insights into the formation of conductive 2DEGs at metal oxide/Al 2 O 3 interfaces and lays the foundation for further applications as electrodes in bioelectronic devices.
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Research context

OpenAlex topics: Electronic and Structural Properties of Oxides · Semiconductor materials and devices · ZnO doping and properties

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Biomolecular Engineering, Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan

Institute of Nano-Life-Systems, Institutes of Innovation for Future Society, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan

Department of Life Science and Technology, Tokyo Institute of Technology, Nagatsuta 4259, Midori-ku, Yokohama 226-8501, Japan

Japan Science and Technology Agency (JST), Precursory Research for Embryonic Science and Technology (PRESTO), Kawaguchi 332-0012, Saitama, Japan

Department of Applied Chemistry, Graduate School of Engineering, The University of Tokyo, Tokyo 113-8656, Japan

Department of Materials Chemistry & Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University, Nagoya 464-8603, Japan

Department of Materials Chemistry, Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan

Institute for Materials Chemistry and Engineering, Kyushu University, Kasuga 816-8580, Fukuoka, Japan

Institute of Quantum Life Science, National Institutes for Quantum Science and Technology (QST), Anagawa 4-9-1, Inage-ku, Chiba 263-8555, Japan

Funding

New Energy and Industrial Technology Development Organization · Ministry of Education, Culture, Sports, Science and Technology · Strategic International Collaborative Research Program · Precursory Research for Embryonic Science and Technology · Japan Agency for Medical Research and Development · AIP Network Laboratory · Japan Society for the Promotion of Science

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