journal article·2015-10-21

Tracking the Effect of Adatom Electronegativity on Systematically Modified AlGaN/GaN Schottky Interfaces

Maria Reiner, Rudolf Pietschnig, Clemens Ostermaier

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Abstract

The influence of surface modifications on the Schottky barrier height for gallium nitride semiconductor devices is frequently underestimated or neglected in investigations thereof. We show that a strong dependency of Schottky barrier heights for nickel/aluminum-gallium nitride (0001) contacts on the surface terminations exists: a linear correlation of increasing barrier height with increasing electronegativity of superficial adatoms is observed. The negatively charged adatoms compete with the present nitrogen over the available gallium (or aluminum) orbital to form an electrically improved surface termination. The resulting modification of the surface dipoles and hence polarization of the surface termination causes observed band bending. Our findings suggest that the greatest Schottky barrier heights are achieved by increasing the concentration of the most polarized fluorine-gallium (-aluminum) bonds at the surface. An increase in barrier height from 0.7 to 1.1 eV after a 15% fluorine termination is obtained with ideality factors of 1.10 ± 0.05. The presence of surface dipoles that are changing the surface energy is proven by the sessile drop method as the electronegativity difference and polarization influences the contact angle. The extracted decrease in the Lifshitz-van-der-Waals component from 48.8 to 40.4 mJ/m(2) with increasing electronegativity and concentration of surface adatoms confirms the presence of increasing surface dipoles: as the polarizability of equally charged anions decreases with increasing electronegativity, the diiodomethane contact angles increase significantly from 14° up to 39° after the 15% fluorine termination. Therefore, a linear correlation between increasing anion electronegativity of the (Al)GaN termination and total surface energy within a 95% confidence interval is obtained. Furthermore, our results reveal a generally strong Lewis basicity of (Al)GaN surfaces explaining the high chemical inertness of the surfaces.
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Research context

OpenAlex topics: Semiconductor materials and interfaces · GaN-based semiconductor devices and materials · Semiconductor materials and devices

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Infineon Technologies Austria AG, Siemensstr. 2-5, 9500 Villach, Austria

Institute of Chemistry and CINSaT, University of Kassel, Heinrich-Plett-Str. 40, 34132 Kassel, Germany

References (43)

Show source-provided references
1. 10.1016/S0038-1101(99)00089-110.1016/S0038-1101(99)00089-1 ↗
2. 10.1063/1.297346310.1063/1.2973463 ↗
3. Sze, S. M.Physics of Semiconductor Devices,2nded;John Wiley and Sons:NJ, 1981; pp245–261.
4. 10.1016/S0927-796X(01)00037-710.1016/S0927-796X(01)00037-7 ↗
5. 10.1063/1.291334410.1063/1.2913344 ↗
6. 10.1063/1.485840010.1063/1.4858400 ↗
7. 10.1016/S0038-1101(98)00099-910.1016/S0038-1101(98)00099-9 ↗
8. 10.1016/S0169-4332(97)80112-210.1016/S0169-4332(97)80112-2 ↗
9. 10.1039/B514811C10.1039/B514811C ↗
10. 10.1021/j100806a00810.1021/j100806a008 ↗
11. 10.1002/1521-3951(200111)228:2<519::AID-PSSB519>3.3.CO;2-110.1002/1521-3951(200111)228:2<519::AID-PSSB519>3.3.CO;2-1 ↗
12. 10.1063/1.481175610.1063/1.4811756 ↗
13. 10.1016/j.mser.2004.11.00210.1016/j.mser.2004.11.002 ↗
14. 10.1021/jp911259n10.1021/jp911259n ↗
15. 10.1063/1.36557510.1063/1.365575 ↗
16. 10.1021/la903847810.1021/la9038478 ↗
17. 10.1088/0034-4885/53/3/00110.1088/0034-4885/53/3/001 ↗
18. 10.1063/1.36123610.1063/1.361236 ↗
19. 10.1103/PhysRevB.50.806710.1103/PhysRevB.50.8067 ↗
20. 10.1021/jp994309k10.1021/jp994309k ↗
21. 10.1063/1.147248110.1063/1.1472481 ↗
22. 10.1021/ac049476h10.1021/ac049476h ↗
23. 10.1063/1.36881410.1063/1.368814 ↗
24. 10.1016/S0169-4332(97)00190-610.1016/S0169-4332(97)00190-6 ↗
25. 10.1103/PhysRevLett.79.393410.1103/PhysRevLett.79.3934 ↗
26. 10.1557/opl.2015.55710.1557/opl.2015.557 ↗
27. 10.1002/adma.20130164010.1002/adma.201301640 ↗
28. 10.1016/0021-9614(88)90148-610.1016/0021-9614(88)90148-6 ↗
29. Utke, I.; Moshkalev, S.; Russel, P.Nanofabrication Using Focused Ion and Electron Beams: Principles and application;Oxford University Press:New York, 2012; pp120.
30. 10.1002/zaac.1932207020710.1002/zaac.19322070207 ↗
31. Darwent, B. deB.Bond Dissociation Energies in Simple Molecules.Nat. Stand. Ref. Data Ser., Natl. Bur. Stand. (U.S.); 1970; Vol.31.10.6028/NBS.NSRDS.31 ↗
32. 10.1016/0378-4363(80)90054-610.1016/0378-4363(80)90054-6 ↗
33. 10.1063/1.151879410.1063/1.1518794 ↗
34. 10.1109/JSEN.2006.87798410.1109/JSEN.2006.877984 ↗
35. 10.1063/1.178528710.1063/1.1785287 ↗
36. 10.1063/1.344689510.1063/1.3446895 ↗
37. Reiner, M.; Lagger, P.; Schmid, M.; Frischmuth, T.; Stadtmueller, M.; Schmid, U.; Pietschnig, R.; Ostermaier, C., manuscript in preparation.
38. 10.1021/cr00088a00610.1021/cr00088a006 ↗
39. Pearton, S. J.Processing of Wide-Bandgap Semiconductors;Noyes Publications:New York, 2000; pp81.10.1016/B978-081551439-8.50012-2 ↗
40. 10.1016/S0038-1101(97)00173-110.1016/S0038-1101(97)00173-1 ↗
41. 10.1016/j.mser.2004.11.00210.1016/j.mser.2004.11.002 ↗
42. 10.1116/1.59015610.1116/1.590156 ↗
43. 10.1016/S0079-6816(01)00060-010.1016/S0079-6816(01)00060-0 ↗