journal article·2021-04-28

Fabrication of Large-Scale High-Mobility Flexible Transparent Zinc Oxide Single Crystal Wafers

Yi-Cheng Chen, Yu-Hao Tu, Li-Wei Chen, Yu-Hong Lai, Meng-Fu Tsai, Ying-Xiu Lin, Hou-Chou Lai, Ching-Yu Chiang, Heng-Jui Liu, Hsin-Che Pan, Tzu-Yi Yang, Dawei Zhang, Jan Seidel, Jyh-Ming Wu, Yu-Lun Chueh, Wen-Hao Chang, Ching-Shun Ku, Shih-Hsun Chen, Li Chang, Ying-Hao Chu

ACS Applied Materials & Interfaces· Volume 13· Issue 16
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Abstract

Single crystal wafers, such as silicon, are the fundamental carriers of advanced electronic devices. However, these wafers exhibit rigidity without mechanical flexibility, limiting their applications in flexible electronics. Here, we propose a new approach to fabricate 1.5 in. flexible functional zinc oxide (ZnO) single crystal wafers with high electron mobility (>100 cm2 V–1 s–1) and optical transparency (>80%) by a combination of thin-film deposition, a chemical solution method, and surficial treatment. The uniformity of the flexible single crystal wafers is examined by an advanced scanning X-ray diffraction technique and photoluminescence spectroscopy. The transport properties of ZnO flexible single crystal wafers retain their pristine states under various bending conditions, including cyclability and endurability. This approach demonstrates a breakthrough in the fabrication of the flexible single crystal wafers for future flexible optoelectronic applications.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: ZnO doping and properties · Thin-Film Transistor Technologies · Advanced Sensor and Energy Harvesting Materials

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu 30010, Taiwan

Department of Mechanical Engineering, National Taiwan University of Science and Technology, Taipei 10607, Taiwan

National Synchrotron Radiation Research Center, Hsinchu 30010, Taiwan

Department of Materials Science and Engineering, National Chung Hsing University, Taichung 402, Taiwan

Department of Electrophysics, National Chiao Tung University, Hsinchu 30010, Taiwan

Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan

Frontier Research Center on Fundamental and Applied Sciences of Matters, National Tsing Hua University, Hsinchu 30013, Taiwan

School of Materials Science and Engineering, University of New South Wales, Sydney 2052, Australia

ARC Centre of Excellence in Future Low-Energy Electronics Technologies (FLEET), UNSW Sydney, Sydney 2052, Australia

Center for Emergent Functional Matter Science, National Chiao Tung University, Hsinchu 30010, Taiwan

Funding

Ministry of Education · Australian Research Council · Ministry of Science and Technology, Taiwan · National Chiao Tung University

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