journal article·2021-12-22

Tailoring Patterned Visible-Light Scattering by Silicon Photonic Crystals

Pengfei Cheng, Ronald Kampmann, Dong Wang, Stefan Sinzinger, Peter Schaaf

ACS Applied Materials & Interfaces· Volume 13· Issue 50
Publisher page

Abstract

Searching for the relationship between the nanostructure and optical properties has always been exciting the researchers in the field of optics (linear optics as well as non-linear optics), energy harvesting (anti-reflective Si solar cells, perovskite solar cells, ..., etc.), and industry (anti-reflection coating on car windows, sunglasses, etc.). In this work, we present an approach for nanostructuring the silicon substrate to silicon photonic crystals. By precisely controlling the etching time and etching path after using nanoimprint lithography, ordered arrays of inverted Si nanopyramids and Si nanopillars with good homogeneity, uniform surface roughness, high reproducibility of pattern transfer, and a controllable aspect ratio are prepared. Experimental investigation of the optical properties indicates that the reflections of these Si nanostructures are mainly determined by the aspect ratio as well as the period of nanostructures. Furthermore, we have experimentally observed visible-light scattering (V-LS) patterns on inverted Si nanopyramids and Si nanopillars, and their corresponding patterns can be precisely controlled by the patterned nanostructures. The V-LS pattern, background, and "ghost peaks" on the angle-resolved scattering results are caused by constructive interference, destructive interference, and the interference situation between both. This controllable nanopatterning on crystalline Si substrates with precisely tunable optical properties shows great potential for applications in many fields, for example, optics, electronics, and energy.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Photonic Crystals and Applications · Optical Coatings and Gratings · Photonic and Optical Devices

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Chair Materials for Electrical Engineering and Electronics, Institute of Materials Science and Engineering and Institute of Micro and Nanotechnologies MacroNano, TU Ilmenau, Gustav-Kirchhoff-Str. 5, 98693 Ilmenau, Germany

Voxalytic GmbH, Rosengarten 3, 76228 Karlsruhe, Germany

Fachgebiet Technische Optik, Institute for Micro and Nanotechnologies MacroNano, TU Ilmenau, Helmholtzring 1, 98693 Ilmenau, Germany

Funding

Bundesministerium f??r Bildung und Forschung · Deutsche Forschungsgemeinschaft · China Scholarship Council

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