Preparations, Electroconductivity, and Tribological Properties of the Lubricative and Conductive Difunctional NbSe₂ Films

The special needs of some fields, such as aerospace and semiconductor manufacturing, are stimulating research on conductive and lubricative materials. This study used magnetron sputtering technology to prepare NbSe 2 functional films with metal-like conductivity and MoS 2 -like lubricity. The composition, structure, and performance of NbSe 2 films deposited under different processes were systematically analyzed by a series of characterization methods. The results indicate that only suitable argon flow and bias voltage are conducive to promoting the crystallization and densification of the NbSe 2 film, giving it high adhesion strength and low static contact resistivity. Compared with the traditional MoS 2 film, the contact voltage of the optimized NbSe 2 film is reduced by 3/4, and the wear rate is reduced by more than half under the current-carrying conditions. The friction and wear mechanisms of NbSe 2 films under current-carrying conditions finally were revealed by analysis of friction contact interface behaviors. This NbSe 2 film with both good lubricity and good conductivity will become an irreplaceable candidate for the development of multifunctional lubricating materials in response to emerging scenarios.