journal article·2024-06-19

Tuning the Threshold Voltage of an Oxide Thin-Film Transistor by Electron Injection Control Using a p−n Semiconductor Heterojunction Structure

Jung Hoon Han, Dong Yeob Shin, Chihun Sung, Sung Haeng Cho, Byeong-Kwon Ju, Kwun-Bum Chung, Sooji Nam

ACS Applied Materials & Interfaces· Volume 16· Issue 24
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Abstract

Herein, a heterojunction structure integrating p-type tellurium (Te) and n-type aluminum-doped indium−zinc-tin oxide (Al:IZTO) is shown to precisely modulate the threshold voltage ( V T ) of the oxide thin-film transistor (TFT). The proposed architecture integrates Te as an electron-blocking layer and Al:IZTO as a charge-carrier transporting layer, thereby enabling controlled electron injection. The effects of incorporating the Te layer onto Al:IZTO are investigated, with a focus on X-ray photoelectron spectroscopy (XPS) analysis, in order to explain the behavior of oxygen vacancies and to depict the energy band structure configurations. By modulating the thickness and employing both single and double deposition methods for the heterojunction Te layer, a remarkable V T shift of up to +20 V is achieved. Furthermore, this study also shows excellent stability to a positive bias stress of +2 MV/cm for 10,000 s without additional passivation layers, demonstrating the robustness of the designed TFT. By a thorough optimization of the Al:IZTO/Te interface, the results demonstrate not only the substantial impact of the introduced heterojunction structure on V T control but also the endurance, durability, and stability of the optimized TFTs under prolonged long-term operating stress, thus offering promising prospects for tailored semiconductor device applications.
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Research context

OpenAlex topics: Thin-Film Transistor Technologies · Semiconductor materials and devices · Silicon Nanostructures and Photoluminescence

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Flexible Electronic Device Research Division, Electronics and Telecommunications Research Institute, 218, Yuseong-gu, Daejeon 34129, Korea

Department of Micro/Nano System, Korea University, Seongbuk-gu, Seoul 136-713, Korea

Division of Physics and Semiconductor Science, Dongguk University, Jung-gu, Seoul 04620, Korea

Semiconductor and Advanced Device Engineering, University of Science and Technology, 217, Yuseong-gu, Daejeon 305-350, Korea

Funding

National Research Council of Science and Technology · Ministry of Trade, Industry and Energy · Electronics and Telecommunications Research Institute

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