High-Quality Patterning of CsPbBr₃ Perovskite Films through Lamination-Assisted Femtosecond Laser Ablation toward Light-Emitting Diodes

Metal halide perovskites have exhibited promising potential for practical applications such as image sensors and displays benefiting from their outstanding optoelectronic properties. However, owing to the instability of the perovskite materials, producing patterned perovskite films with adequately high quality and high precision for such practical applications poses a challenge for existing patterning methods. Herein, the lamination-assisted femtosecond laser ablation (LA-FsLA) technique was successfully applied to fabricate patterned CsPbBr3 films with sufficiently high quality and high precision. A sandwich-laminated structure (glass/CsPbBr3/glass) was introduced to avoid the impact of debris on the patterned perovskite film. As a result, arbitrarily patterned perovskite films with high quality, submicron precision, and well-defined edges were successfully prepared. Moreover, the light-emitting diodes (LEDs) based on the patterned perovskite films also exhibit good emission characteristics. This work provides a promising strategy for the fabrication of patterned perovskite films with adequately high quality and high precision toward perovskite-based optoelectronic devices.