High Energy Performance Ferroelectric (Ba,Sr)(Zr,Ti)O3 Film Capacitors Integrated on Si at 400 °C
Abstract
Research context
OpenAlex topics: Ferroelectric and Piezoelectric Materials · Dielectric materials and actuators · Microwave Dielectric Ceramics Synthesis
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Affiliations
Key Laboratory for Liquid-Solid Structure Evolution and Processing of Materials (Ministry of Education), School of Materials Science and Engineering, Shandong University, Jinan 250061, China
Institute of Advanced Energy Materials and Chemistry, Jinan Engineering Laboratory for Multi-scale Functional Materials, Shandong Provincial Key Laboratory of Molecular Engineering, School of Chemistry and Chemical Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan 250353, China
Shenzhen Key Laboratory of Nanobiomechanics, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen 518055, China
State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China
School of Materials Science and Engineering, Xiangtan University, Xiangtan, Hunan 411105, China
Funding
Qilu University of Technology · National Natural Science Foundation of China · Shandong Academy of Sciences · Independent Innovation Foundation of Shandong University · State Key Laboratory of New Ceramics and Fine Processing, Tsinghua University · Suzhou City