Crystal dynamics of STO ferroelectric films

According to classic theory of crystalline nucleus formation and growth,crystal dynamics model of STO ferroelectric films was studied.Then,the influences of annealing temperature and its increasing rate on the microstructures of STO films were calculated by this model.The results show that STO film grain size is larger and has wide distribution at lower annealing temperature.However,with the increase of annealing temperature to some extent,crystalline nucleus formation ratio increase greatly.The increase of grain size is compressed,which results in smaller grain size.When annealing temperature increasing rate is lower,crystal growth is sufficient,which results in larger grain size.But grain size distribution is wide.At higher annealing temperature ascending rate,grain size is smaller and the grain size distribution is narrow.These simulation results are consistent with our experiments.