Preparation and Characterization of Composite Oxides Functional Membranes by MOCVD

Using a novel mixed matal β- diketonate Precursors, yttria doped CeO2 layers and yttria doped SrCeO3(as dominated Phase)layers have been successfully prepared by MOCVD technique at relatively low temperature on different substrates. CYO layers were poly-crystalline in the thickness about 2μm, having the fcc fluorite structure. SCYO layers were also Polycrystalline with the Perovskite structure.The sizes of crystallite of CYO and SCYO estimated from XRD patterns using Scherrer equation were in the range of several decade nanometer. Proper chemical composition of CYO layers can be obtained through controlling the Ce/Y ratio in the mixed precursor and no carbon impurity occurs in the as - deposited CYO layers. It has been found that substrates have great influence on the formation of SCYO layers and SCYO is easy to be obtained on single crystal YSZ substrate. Rising the depositing temperature and keeping the Sr precursor dry is very important for SCYO preparation.