Fabrication and characterization of single crystal PMnN-PZT ferroelectric thin film

The ternary compound ferroelectric thin films,6% Pb(Mn1/3,Nb2/3)O3-94%Pb(Zr0.45,Ti0.55)O3(PMnN-PZT),were deposited on the MgO substrates by the magnetron sputtering method,and the quench method was adopted for the post heat treatment.The out-plane and in-plane X-ray diffractions were used to characterize the crystal structure of the PMnN-PZT thin films,and the highly accurate scan electron microscope is used to observe the surface and the cross section surface of the thin films.It can be obtained that the PMnN-PZT thin films own single crystal structure and perovskite phase.