DataVXSmall MethodsPaper
journal article·2025-01

High Quality Epitaxial Piezoelectric and Ferroelectric Wurtzite Al1‐xScxN Thin Films

Yang Zeng, Yihan Lei, Yanghe Wang, Mingqiang Cheng, Luocheng Liao, Xuyang Wang, Jinxin Ge, Zhenghao Liu, Wenjie Ming, Chao Li, Shuhong Xie, Jiangyu Li, Changjian Li

Small Methods· Volume 9· Issue 1
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Source abstract

Abstract

Abstract Piezoelectric and ferroelectric wurtzite are promising to reshape modern microelectronics because they can be easily integrated with mainstream semiconductor technology. Sc doped AlN (Al1‐xScxN) has attracted much attention for its enhanced piezoelectric and emerging ferroelectric properties, yet the commonly used sputtering results in polycrystalline Al1‐xScxN films with high leakage current. Here, the pulsed laser deposition of single crystalline epitaxial Al1‐xScxN thin films on sapphire and 4H‐SiC substrates is reported. Pure wurtzite phase is maintained up to x = 0.3 with ≤0.1 at% oxygen contamination. Polarization is estimated to be 140 µC cm−2 via atomic scale microscopy imaging and found to be switchable via a scanning probe. The piezoelectric coefficient is found to be five times of the undoped one when x = 0.3, making it desirable for high‐frequency radiofrequency (RF) filters and 3D nonvolatile memories.
Source: crossref · Quality: baseline

Research context

Electronic materialsMaterials processing

OpenAlex topics: Acoustic Wave Resonator Technologies · Ferroelectric and Piezoelectric Materials · Metal and Thin Film Mechanics

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Key Laboratory of Low Dimensional Materials and Application Technology of Ministry of Education, School of Materials Science and Engineering Xiangtan University Xiangtan Hunan 411105 China

Department of Materials Science and Engineering Southern University of Science and Technology Shenzhen Guangdong 518055 China

Guangdong Provincial Key Laboratory of Functional Oxide Materials and Devices Southern University of Science and Technology Shenzhen Guangdong 518055 China

Key Laboratory of Thin Film Materials and Devices, School of Materials Science and Engineering Xiangtan University Xiangtan Hunan 411105 China

Funding

National Natural Science Foundation of China · Natural Science Foundation of Guangdong Province · Shenzhen Science and Technology Innovation Program

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