journal article·2025-12Open access

Wafer‐Scale Manufacturing and Crack‐Free Transferring of GaN‐Based Membranes for Flexible Optoelectronics

Yaqi Gao, Kaixuan Zhou, Zhetong Liu, Lulu Wang, Yiwei Duo, Shenyuan Yang, Jiankun Yang, Xiang Gao, Wenze Wei, Junxi Wang, Peng Gao, Jinmin Li, Zhongfan Liu, Jingyu Sun, Tongbo Wei

Advanced Science· Volume 12· Issue 46

Abstract

Abstract Heterogeneously integrated devices have great demand for the freestanding wafer‐level wide bandgap semiconductors in their single crystal membrane form. However, the current fabrication strategy is quite costly and low throughput. Here, quasi van der Waals epitaxy (QvdWE) of nearly single crystalline GaN membranes on Si(100) substrate via directly‐grown graphene interfacial layers are demonstrated. Through simple chemical etching, wafer‐scale III‐nitride membranes can be readily realized and transferred onto arbitrary substrates, with minimized damage and wafer‐scale peeling capability. The obtained flexible InGaN‐based light emitting diode device demonstrates strong blue luminescence due to avoiding the crack during transfer process. Meanwhile, flexible ultraviolet photodetector also shows good stability, delivering high responsivity and specific detectivity of 3.52×10 4 A/W and 6.21×10 12 Jones, respectively. This work indicates that the QvdWE heteroepitaxy and intact transfer strategies can help the combination of GaN‐based devices and Si‐based integrated circuits.
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Research context

OpenAlex topics: GaN-based semiconductor devices and materials · Ga2O3 and related materials · Semiconductor materials and devices

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Research and Development Center for Wide Bandgap Semiconductors, Institute of Semiconductors Chinese Academy of Sciences Beijing 100083 China

Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China

Beijing Huairou Laboratory Beijing 101400 China

College of Energy, Soochow Institute for Energy and Materials Innovations, Jiangsu Provincial Key Laboratory for Advanced Carbon Materials and Wearable Energy Technologies Soochow University Suzhou 215006 China

Beijing Graphene Institute (BGI) Beijing 100095 China

Center for Nanochemistry (CNC), Beijing Science and Engineering Center for Nanocarbons, Beijing National Laboratory for Molecular Sciences, College of Chemistry and Molecular Engineering Peking University Beijing 100871 China

Electron Microscopy Laboratory, and International Center for Quantum Materials, School of Physics Peking University Beijing 100871 China

State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors Chinese Academy of Sciences Beijing 100083 China

Funding

National Natural Science Foundation of China · National Key Research and Development Program of China

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