Electromechanical properties of BaTiO3-xBaSnO3 thin films prepared via combinatorial sputtering
Source abstract
Abstract
Abstract (1−x)BaTiO3-xBaSnO3 (BT-xBS, 0≤x≤0.20) perovskite thin films were deposited on Pt/Ti/Si substrates with uniaxial graded composition by using a dual-target combinatorial sputtering technique. These films were highly (101)-oriented and showed strong composition dependence in their electromechanical properties. The maximum value of the relative dielectric constant was 925 at around x=0.028, where the transverse piezoelectric coefficient |e31, f| also peaked at about 1.5–1.9 C/m2. This |e31, f| value is higher than those of epitaxial BaTiO3 thin films. Our results indicate that BT-xBS is a promising substitute of lead-based perovskites for applications in piezoelectric MEMS devices.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Ferroelectric and Piezoelectric Materials · Electronic and Structural Properties of Oxides · Acoustic Wave Resonator Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (28)
Show source-provided references
1. Reliability of vibration energy harvesters of metal-based PZT thin films10.1088/1742-6596/557/1/012096 ↗
2. Piezoelectric MEMS for energy harvesting10.1557/mrs.2012.275 ↗
3. Thin-film piezoelectric MEMS10.1557/mrs.2012.273 ↗
4. Piezoelectric MEMS sensors: state-of-the-art and perspectives10.1088/0957-0233/20/9/092001 ↗
5. Giant piezoelectricity on Si for hyperactive MEMS10.1126/science.1207186 ↗
6. Lead-free piezoceramics10.1038/nature03028 ↗
7. (100)-Textured KNN-based thick film with enhanced piezoelectric property for intravascular ultrasound imaging10.1063/1.4919387 ↗
8. Lead-free piezoelectric MEMS energy harvesters of (K,Na)NbO3 thin films on stainless steel cantilevers10.7567/JJAP.52.09KD13 ↗
9. Piezoelectric properties and temperature stabilities of Mn- and Cu-modified BiFeO3-BaTiO3 high temperature ceramics10.1016/j.jeurceramsoc.2012.11.019 ↗
10. Orientation dependence of transverse piezoelectric properties of epitaxial BaTiO 3 films10.1143/JJAP.49.09MA09 ↗
11. Large piezoelectric effect in Pb-free ceramics10.1103/PhysRevLett.103.257602 ↗
12. Compositional dependence of Ba(Zr0.2Ti0.8)O3–(Ba0.7Ca0.3)TiO3 piezoelectric thin films prepared by combinatorial sputtering10.1016/j.tsf.2015.04.050 ↗
13. Enhancement of ferroelectricity in strained BaTiO3 Thin Films.pdf10.1126/science.1103218 ↗
14. Orthorhombic-tetragonal phase coexistence and enhanced piezo-response at room temperature in Zr, Sn, and Hf modified BaTiO310.1063/1.4885516 ↗
15. Anomalous piezoelectric response due to stabilization of two ferroelectric phases in Zr-modified BaTiO310.1088/0953-8984/25/36/362203 ↗
16. Improvement of piezoelectric properties of (K,Na)NbO3 films deposited by sputtering10.1143/JJAP.50.041503 ↗
17. Film-thickness and composition dependence of epitaxial thin-film PZT-based mass-sensors10.1016/j.sna.2013.05.004 ↗
18. The effect of K and Na excess on the ferroelectric and piezoelectric properties of K0.5Na0.5NbO3 thin films10.1088/0022-3727/42/21/215304 ↗
19. Polarization switching and high piezoelectric response in Sn-modified BaTiO310.1103/PhysRevB.91.024101 ↗
20. Large piezoelectricity and dielectric permittivity in BaTiO3 -xBaSnO3 system: the role of phase coexisting10.1209/0295-5075/98/27008 ↗
21. Ferroelectric to relaxor crossover and dielectric phase diagram in the BaTiO3 -BaSn O3 system10.1063/1.2715522 ↗
22. Perspective on the development of lead-free piezoceramics10.1111/j.1551-2916.2009.03061.x ↗
23. Composition dependence of piezoelectric properties of Pb( Zr,Ti)O3 films prepared by combinatorial sputtering composition dependence of piezoelectric properties of Pb(Zr,Ti)O3 films prepared by combinatorial sputtering10.1143/JJAP.51.09LA12 ↗
24. Compositional dependence of Pb(Mg1/3,Nb2/3)O3 –PbTiO3 piezoelectric thin films by combinatorial sputtering10.7567/JJAP.53.09PA06 ↗
25. Structures of the ferroelectric phases of barium titanate10.1021/j100112a043 ↗
26. Theoretical and experimental study of the structural, dynamical and dielectric properties of perovskite BaSnO310.1088/0953-8984/20/14/145217 ↗
27. Precise measurement of the transverse piezoelectric coefficient for thin films on anisotropic substrate10.1063/1.4789347 ↗
28. Measurement of transverse piezoelectric properties of PZT thin films10.1016/S0924-4247(03)00234-6 ↗