Functional BaTiO3 nanostructures immobilized onto si-based substrates using sol–gel and reverse micelle techniques

The current tendency toward miniaturization of electronic devices has driven the interest in developing ferroelectric materials in low dimensions. In this work, for the preparation of lead-free BaTiO3 nanoparticles, we used a combination of the sol–gel method with the reverse micelles techniques. Moreover, previously to the thermal treatment, it was necessary to remove the surfactant. For this stage, oleic acid was used to stabilize the nanoparticles in the solution. Then, nanometer-sized particles were deposited on different substrates (Si, Pt/TiO2/SiO2/Si). The influence of different modes of deposition on particle size, degree of agglomeration, was analyzed. The mean particle size was 10 nm. Finally, the deposition of BaTiO3 particles on a conductive substrate such as the wafer of platinum (Pt/TiO2/SiO2/Si) was confirmed by several AFM techniques.