High sensitivity MEMS vibration sensors based on LiNbO3 ferroelectric single-crystal films
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OpenAlex topics: Acoustic Wave Resonator Technologies · Geophysics and Sensor Technology · Ferroelectric and Piezoelectric Materials
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References (41)
Show source-provided references
1. One-dimensional LSTM-regulated deep residual network for data-driven fault detection in electric machines10.1109/TIE.2023.3265054 ↗
2. Deep learning-based machinery fault diagnostics with domain adaptation across sensors at different places10.1109/TIE.2019.2935987 ↗
3. Signal based condition monitoring techniques for fault detection and diagnosis of induction motors: a state-of-the-art review10.1016/j.ymssp.2020.106908 ↗
4. Multi-modal data cross-domain fusion network for gearbox fault diagnosis under variable operating conditions
5. Recent advances in precision measurement & pointing control of spacecraft10.1016/j.cja.2020.11.018 ↗
6. Bioinspired, omnidirectional, and hypersensitive flexible strain sensors10.1002/adma.202200823 ↗
7. A self-powered vibration sensor based on the coupling of triboelectric nanogenerator and electromagnetic generator10.1016/j.nanoen.2022.107164 ↗
8. Design of vibration-sourced piezoelectric harvester for battery-powered smart road sensor systems10.1109/JSEN.2020.3000489 ↗
9. Theory, technology and applications of piezoresistive sensors: a review10.1016/j.sna.2018.07.006 ↗
10. Monolithically integrated triaxial high-performance micro accelerometers with position-independent pure axial stressed piezoresistive beams10.1038/s41378-022-00474-z ↗
11. Acceleration sensors: sensing mechanisms, emerging fabrication strategies, materials, and applications10.1021/acsaelm.0c00746 ↗
12. Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging10.1038/s41378-023-00620-1 ↗
13. An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement10.1038/s41378-023-00484-5 ↗
14. A ferroelectric-like structural transition in a metal10.1038/nmat3754 ↗
15. Scalable fabrication of a hybrid field-effect and acousto-electric device by direct growth of monolayer MoS2/LiNbO310.1038/ncomms9593 ↗
16. High density lithium niobate photonic integrated circuits10.1038/s41467-023-40502-8 ↗
17. Electro–optically tunable microring resonators in lithium niobate10.1038/nphoton.2007.93 ↗
18. Thermally induced domain reconfiguration in ferroelectric alkaline niobate10.1002/adfm.202204421 ↗
19. A review on piezo- and pyroelectric responses of flexible nano- and micropatterned polymer surfaces for biomedical sensing and energy harvesting applications10.1016/j.nanoen.2020.105442 ↗
20. Sensing with MXenes: progress and prospects10.1002/adma.202005846 ↗
21. MEMS development focusing on collaboration using common facilities: a retrospective view and future directions10.1038/s41378-021-00290-x ↗
22. Electrostatic levitation: an elegant method to control MEMS switching operation10.1007/s11071-021-06499-9 ↗
23. Thermogravimetric analysis on a resonant microcantilever10.1021/acs.analchem.2c01374 ↗
24. Design and implementation of a jellyfish otolith-inspired MEMS vector hydrophone for low-frequency detection10.1038/s41378-020-00227-w ↗
25. Mixed near field and far field sources localization algorithm based on MEMS vector hydrophone array10.1016/j.measurement.2019.107109 ↗
26. High sensitivity MEMS accelerometer using PZT-based four L-shaped beam structure10.1109/JSEN.2022.3155407 ↗
27. High-temperature vibration sensor based on Ba2TiSi2O8 piezoelectric crystal with ultra-stable sensing performance up to 650°C10.1109/TIE.2020.3044792 ↗
28. Design, fabrication and characterization of high temperature piezoelectric vibration sensor using YCOB crystals10.1016/j.sna.2012.02.003 ↗
29. AlN single crystal accelerometer for nuclear power plants10.1109/TIE.2020.2992002 ↗
30. An experimentally validated bimorph cantilever model for piezoelectric energy harvesting from base excitations10.1088/0964-1726/18/2/025009 ↗
31. Issues in mathematical modeling of piezoelectric energy harvesters10.1088/0964-1726/17/6/065016 ↗
32. Review: inertial sensors for low-frequency seismic vibration measurement10.1785/0120110223 ↗
33. A low-frequency vibration insensitive pendulum bench based on translation-tilt compensation in measuring the performances of inertial sensors, Classical and Quantum Gravity
34. Miniaturized langasite MEMS micro-cantilever beam structured resonator for high temperature gas sensing10.1088/1361-665X/ab78b6 ↗
35. Analysis of the mechanical vibrations of a complex structure as a damped single degree of freedom system10.36561/ING.23.2 ↗
36. High-performance SAW device based on zinc-oxide substrate with electric field regulating graphene film conductivity for signal amplifier10.1109/LED.2022.3207908 ↗
37. Effect of γ-ray irradiation on performance of LiNbO3-based piezoelectric vibration sensors10.1209/0295-5075/ac39ef ↗
38. High-performance piezoelectric-type MEMS vibration sensor based on LiNbO3 single-crystal cantilever beams10.3390/mi13020329 ↗
39. Piezoelectric P(VDF-TrFE) transducers assembled with micro injection molded polymers10.1016/j.sna.2013.12.032 ↗
40. YCa4O(BO3)3 (YCOB) high temperature vibration sensor10.1063/1.3598115 ↗
41. Fuzzy K-means clustering with discriminative embedding10.1109/TKDE.2020.2995748 ↗