From data to decarbonization: enhancing process greenhouse gas visibility in semiconductor manufacturing

The semiconductor industry is a critical enabler of the digital economy, yet its manufacturing processes are among the most greenhouse gas (GHG)-intensive in the industrial sector, particularly due to process emissions from high global warming potential (GWP) gases such as perfluorocarbons , nitrogen trifluoride (NF3), and sulfur hexafluoride (SF6). Although abatement technologies and process optimization have reduced emissions intensity, persistent challenges in data granularity, timeliness, and interoperability limit the effectiveness of reduction strategies. This paper elaborates an integrated process GHG data visibility framework for the semiconductor industry, leveraging advanced sensing, real-time analytics, and cross-platform data integration to capture accurate, process-level emissions data. By enabling greater transparency, the framework creates opportunities for predictive abatement planning, AI-assisted process optimization, precise Scope 1 reporting, and many more. Case scenarios demonstrate how improved data visibility can accelerate the industry’s path toward net-zero goals while fostering competitive advantages through operational efficiency and environmental leadership.