Deep-learning-driven automation of inner and outer object segmentation in SEM/TEM imaging for semiconductor metrology
Source abstract
Abstract
International audience
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis · Advanced Electron Microscopy Techniques and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Université Clermont-Auvergne, CNRS, Mines de Saint-Étienne, Clermont-Auvergne-INP, LIMOS, Clermont-Ferrand, France
Pollen Metrology, Moirans, France
Funding
Auvergne-Rhône-Alpes
References
Reference metadata was not supplied for this record.