Publisher’s note: Deep-learning-driven automation of inner and outer object segmentation in SEM/TEM imaging for semiconductor metrology
Bibliographic record
Abstract
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Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques
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Affiliations
Université Clermont-Auvergne, CNRS, Mines de Saint-Étienne, Clermont-Auvergne-INP, LIMOS, Clermont-Ferrand, France
Pollen Metrology, Moirans, France
References
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