Frequency Modulation and Device Repaired by Laser Surface Treatment in Film Bulk Acoustic Filters

Department of Electronic Engineering, De Lin Institute of Technology, Taipei, Taiwan Electronics and Optoelectronics Research Laboratories, Industrial Technology Research Institute, Hsinchu, Taiwan Graduate Institute of Materials Engineering, National Pingtung University of Science and Technology, Pingtung, Taiwan E-mail: HKLin@mail.npust.edu.tw Department of Computer and Communication, Shu-Te University, Kaohsiung, Taiwan Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung, Taiwan