journal article·2014-04Open access

A comparative study regarding effects of interfacial ferroelectric Bi4Ti3O12 (BTO) layer on electrical characteristics of Au/n-Si structures

M YILDIRIM, M GÖKÇEN

Bulletin of Materials Science· Volume 37· Issue 2

Abstract

Present study focuses on the effects of interfacial ferroelectric BTO layer on the electrical characteristics of Au/n-Si structures, hence Au/n-Si (MS) and Au/BTO/n–Si (MFS) structures were fabricated and admittance measurements (capacitance–voltage: C–V and conductance–voltage: G/ω–V) of both structures were conducted between 10 kHz and 1 MHz at room temperature. Results showed that C–V and G/ω–V characteristics were affected not only by frequency but also through deposition of BTO layer. Some effects can be listed as sharper peaks in C–V plots, higher capacitance and conductance values. Structure’s series resistance (R s) also decreased due to BTO layer. Interface states (N ss) profiles of the structures were obtained using Hill–Coleman and high-low frequency capacitance (C HF–C LF). Some of the main electrical parameters were extracted from C −2–V plots using depletion capacitance approach. Furthermore, current–voltage characteristics of MS and MFS structures were presented.
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Research context

OpenAlex topics: Semiconductor materials and interfaces · Semiconductor materials and devices · Dielectric properties of ceramics

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References (28)

Show source-provided references
1. Altındal Ş, Parlaktürk F, Tataroğlu A, Parlak M, Sarmasov S N and Agasiev A A 2008 Vacuum 82 124610.1016/j.vacuum.2008.03.001 ↗
2. Aurivillius B 1949 Arkiv. Kemi. 1 49910.1136/bmj.1.4602.499 ↗
3. Bengi A, Aydemir U, Altındal Ş, Özen Y and Özçelik S 2010 J. Alloy. Compd. 505 62810.1016/j.jallcom.2010.06.095 ↗
4. Bozgeyik M S, Cross J S, Ishiwara H and Shinozaki K 2010 Microelectron. Eng. 87 217310.1016/j.mee.2010.01.021 ↗
5. Carrano J, Sudhama C, Chikarmane V, Lee J, Tasch A, Sherpherd W and Abt N 1991 IEEE Trans. Sonics Ultrason. 38 69010.1109/58.108871 ↗
6. Castange R and Vapaille A 1971 Surf. Sci. 28 15710.1016/0039-6028(71)90092-6 ↗
7. Chia W K, Chen Y C, Yang C F, Young S L, Chiang W T and Tsai Y T 2006 J. Electroceram. 17 17310.1007/s10832-006-7063-0 ↗
8. Choopun S, Matsumoto T and Kawai T 1995 Appl. Phys. Lett. 67 107210.1063/1.114468 ↗
9. Gautam P, Bhattacharyya S, Singh S K and Tandon R P 2010 Integr. Ferroelectr. 122 6310.1080/10584587.2010.492288 ↗
10. Gökçen M and Tunç T 2013 Int. J. Appl. Ceram. Technol. 10 E6410.1111/ijac.12009 ↗
11. Gökçen M and Yıldırım M 2012 Chin. Phys. B21 12850210.1088/1674-1056/21/12/128502 ↗
12. Gökçen M, Altuntaş H, Altındal Ş and Özçelik S 2011 Mat. Sci. Semicond. Proc. 15 4110.1016/j.mssp.2011.08.001 ↗
13. Hill W A and Coleman C C 1980 Solid-State Electron. 23 98710.1016/0038-1101(80)90064-7 ↗
14. Joshi P C and Krupanidhi S B 1993 Appl. Phys. Lett. 62 192810.1063/1.109547 ↗
15. Kumar J 2005 Bull. Mater. Sci. 28 35510.1007/BF02704249 ↗
16. Lappalainen J, Tuller H L and Lantto V 2004 J. Electroceram. 13 12910.1007/s10832-004-5088-9 ↗
17. Megriche A, Lebrun L and Troccaz M 1999 Sensos Actuat. A-Phys. 78 8810.1016/S0924-4247(99)00223-X ↗
18. Nanda Kumar Reddy N and Rajagopal Reddy V 2012 Bull. Mater. Sci. 35 5310.1007/s12034-011-0262-6 ↗
19. Nicollian E H and Brews J R 1982 Metal oxide semiconductor (MOS) physics and technology (New York: John Willey & Sons)
20. Parlaktürk F, Altındal Ş, Tataroğlu A, Parlak M and Agasiev A 2008 Microelectron. Eng. 85 8110.1016/j.mee.2007.03.012 ↗
21. Ren T L, Shao T Q, Zhang W Q, Li C X, Liu J S, Liu L T, Zhu J and Li Z J 2011 Microelectron. Eng. 66 55410.1016/S0167-9317(02)00965-6 ↗
22. Sugibuchi K, Kurogi Y and Endo N 1975 J. Appl. Phys. 46 287710.1063/1.322014 ↗
23. Tang M H, Dong G J, Sugiyama Y and Ishiwara H 2010 Semicond. Sci. Technol. 25 03500610.1088/0268-1242/25/3/035006 ↗
24. Theis C D, Yeh J, Schlom D G, Hawley M E, Brown G W, Jiang J C and Pan X Q 1998 Appl. Phys. Lett. 72 281710.1063/1.121468 ↗
25. Uslu H, Yıldırım M, Altındal Ş and Durmuş P 2012 Radiat. Phys. Chem. 81 36210.1016/j.radphyschem.2011.12.029 ↗
26. Villegas M, Jardiel T, Caballero A C and Fernandez J F 2004 J. Electroceram. 13 54310.1007/s10832-004-5155-2 ↗
27. Wang H and Ren M F 2005 J. Mater. Sci.-Mater. El. 16 20910.1007/s10854-005-0767-0 ↗
28. Yıldırım M, Eroğlu A, Altındal Ş and Durmuş P 2011 J. Optoelectron. Adv. M. 13 98