Synthesis of ferroelectric thin films through the sol-gel process

This paper discusses the reactivity of various solution precursors for thin multicomponent ceramic films. We describe the synthesis of colloidal solutions precursors of the ferroelectric PbTixZr1-xO3 perovskite. Solutions with a rheological behaviour adapted to spin-coating can be obtained by controlling the reactivity of the starting alkoxides using chemical modifiers (such as acetylaceton acting on the metal alkoxides) and optimized hydrolysis. But a compromise must be found between the control of the condensation in the solution and the reactivity on the point of view of phase crystallization and densification. The mechanisms of crystallization of the PbZrO3 phase have been studied as a function of the starting precursors.