DataVXJournal of Coatings Technology and ResearchPaper
journal article·2026-01Open access

Emerging applications and trends in atomic layer deposition nano-coatings

Emmanuel O. Atofarati, Peter O. Oviroh, Oladipo Folorunso, Tien Chien Jen

Journal of Coatings Technology and Research· Volume 23· Issue 1
Publisher pageOpen full text
Source abstract

Abstract

Abstract Nano-coating with atomic layer deposition (ALD) has emerged as a pivotal technology for enhancing the performance of a wide range of applications. This review explores recent advancements in ALD nano-coating, with a focus on its high conformality and precision. The review covers key coating techniques and comprehensive methods for analytical coating assessment. The applications discussed include multifunctional coatings, biomedical devices, quantum dot-based technologies, photovoltaic solar cells, energy storage systems, membrane/barrier films, metal–organic frameworks, graphene integration, and sensor technologies. Additionally, the review highlights emerging trends, current applications, and identifies various research gaps, offering insights into potential future directions for ALD nano-coating. The findings underscore ALD’s significant impact in advancing both scientific and industrial applications, while emphasizing the need for continued innovation to address existing challenges.
Source: crossref · Quality: baseline

Research context

NanomaterialsElectronic materialsMaterials processing

OpenAlex topics: Semiconductor materials and devices · Electronic and Structural Properties of Oxides · Advanced Memory and Neural Computing

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (100+)

Show source-provided references
1. Joshi, M, Adak, B, "Advances in nanotechnology based functional, smart and intelligent textiles: A review." In: Comprehensive Nanoscience and Nanotechnology, Vol. 1–5, pp. 253–290. Elsevier (2019)10.1016/B978-0-12-803581-8.10471-0 ↗
2. Saji, VS, “The impact of nanotechnology on reducing corrosion cost.” Corros. Prot. Control Using Nanomater., https://doi.org/10.1533/9780857095800.1.3 (2012)10.1533/9780857095800.1.3 ↗
3. Bao, W, Deng, Z, Zhang, S, Ji, Z, Zhang, H, “Next-generation composite coating system: Nanocoating.” Front. Mater., 6 456324. https://doi.org/10.3389/FMATS.2019.00072/BIBTEX (2019)10.3389/FMATS.2019.00072/BIBTEX ↗
4. Kim, YK, "Nanotechnology-based advanced coatings and functional finishes for textiles." In: Smart Textile Coatings and Laminates. Woodhead Publ. Ser. Text., pp. 251–263. https://doi.org/10.1533/9781845697785.2.251 (2010)10.1533/9781845697785.2.251 ↗
5. Weimer, AW, “From a laboratory curiosity to a commercial powder processing plant—A personal perspective.” Powder Technol., 418 118279. https://doi.org/10.1016/J.POWTEC.2023.118279 (2023)10.1016/J.POWTEC.2023.118279 ↗
6. Oviroh, PO, Akbarzadeh, R, Pan, D, Coetzee, RAM, Jen, TC, “New development of atomic layer deposition: processes, methods and applications.” Sci. Technol. Adv. Mater., 20 (1) 465–496. https://doi.org/10.1080/14686996.2019.1599694 (2019)10.1080/14686996.2019.1599694 ↗
7. Kim, H, Lee, HBR, Maeng, WJ, “Applications of atomic layer deposition to nanofabrication and emerging nanodevices.” Thin Solid Films, 517 (8) 2563–2580. https://doi.org/10.1016/J.TSF.2008.09.007 (2009)10.1016/J.TSF.2008.09.007 ↗
8. Oviroh, PO, Jen, TC, Ren, J, van Duin, A, “Towards the realisation of high permi-selective MoS2 membrane for water desalination.” NPJ Clean Water, 6(1) 1–15. https://doi.org/10.1038/s41545-023-00228-y (2023)10.1038/s41545-023-00228-y ↗
9. Narayan, RJ, et al., “Atomic layer deposition-based functionalization of materials for medical and environmental health applications." Philos. Trans. R. Soc. A Math. Phys. Eng. Sci., 368(1917) 2033–2064. https://doi.org/10.1098/RSTA.2010.0011 (2010)10.1098/RSTA.2010.0011 ↗
10. Puurunen, RL, “A Short history of atomic layer deposition: Tuomo Suntola’s atomic layer epitaxy.” Chem. Vap. Depos., 20 332–344. https://doi.org/10.1002/CVDE.201402012 (2014)10.1002/CVDE.201402012 ↗
11. G. N. Parsons et al., “History of atomic layer deposition and its relationship with the American Vacuum Society,” J. Vac. Sci. Technol. A Vacuum, Surfaces, Film., https://doi.org/10.1116/1.4816548/244856 (2013)10.1116/1.4816548/244856 ↗
12. Dendooven, J, Detavernier, C, “Basics of atomic layer deposition: Growth characteristics and conformality.” In: Bachmann, Julien (ed.) Atomic Layer Deposition in Energy Conversion Applications, pp. 1–40. Wiley. https://doi.org/10.1002/9783527694822.ch1 (2017)10.1002/9783527694822.ch1 ↗
13. George, SM, “Atomic layer deposition: An overview.” Chem. Rev., 110 (1) 111–131. https://doi.org/10.1021/CR900056B (2010)10.1021/CR900056B ↗
14. Weimer, AW, “Particle atomic layer deposition.” J. Nanoparticle Res., 21 (1) 1–42. https://doi.org/10.1007/S11051-018-4442-9/FIGURES/46 (2019)10.1007/S11051-018-4442-9/FIGURES/46 ↗
15. van Ommen, JR, Goulas, A, “Atomic layer deposition on particulate materials.” Mater. Today Chem., 14 100183. https://doi.org/10.1016/J.MTCHEM.2019.08.002 (2019)10.1016/J.MTCHEM.2019.08.002 ↗
16. Hu, Y, Lu, J, Feng, H, “Surface modification and functionalization of powder materials by atomic layer deposition: A review.” RSC Adv., 11 (20) 11918–11942. https://doi.org/10.1039/D1RA00326G (2021)10.1039/D1RA00326G ↗
17. Mallick, BC, Hsieh, C-T, Yin, K-M, Gandomi, YA, Huang, K-T, “Review—on atomic layer deposition: Current progress and future challenges.” ECS J. Solid State Sci. Technol., 8(4) N55–N78. https://doi.org/10.1149/2.0201903JSS/XML (2019)10.1149/2.0201903JSS/XML ↗
18. Oke, JA, Jen, TC, “Atomic layer deposition thin film techniques and its bibliometric perspective.” Int. J. Adv. Manuf. Technol., 126 (11–12) 4811–4825. https://doi.org/10.1007/S00170-023-11478-Y/TABLES/6 (2023)10.1007/S00170-023-11478-Y/TABLES/6 ↗
19. Cremers, V, Puurunen, RL, Dendooven, J, “Conformality in atomic layer deposition: Current status overview of analysis and modelling.” Appl. Phys. Rev., https://doi.org/10.1063/1.5060967/570185 (2019)10.1063/1.5060967/570185 ↗
20. Kunene, TJ, Tartibu, LK, Ukoba, K, Jen, T-C, “Review of atomic layer deposition process, application and modeling tools.” Mater. Today Proc., 62 95–109. https://doi.org/10.1016/J.MATPR.2022.02.094 (2022)10.1016/J.MATPR.2022.02.094 ↗
21. Groner, MD, Fabreguette, FH, Elam, JW, George, SM, “Low-Temperature Al2O3 atomic layer deposition.” Chem. Mater., 16 (4) 639–645. https://doi.org/10.1021/CM0304546 (2004)10.1021/CM0304546 ↗
22. Leskelä, M, Ritala, M, “Atomic layer deposition (ALD): From precursors to thin film structures.” Thin Solid Films, 409 (1) 138–146. https://doi.org/10.1016/S0040-6090(02)00117-7 (2002)10.1016/S0040-6090(02)00117-7 ↗
23. Miikkulainen, V, Leskelä, M, Ritala, M, Puurunen, RL, “Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends.” J. Appl. Phys., https://doi.org/10.1063/1.4757907/924855 (2013)10.1063/1.4757907/924855 ↗
24. Scott, ID, et al. “Ultrathin coatings on nano-LiCoO2 for Li-ion vehicular applications.” Nano Lett., 11 (2) 414–418. https://doi.org/10.1021/NL1030198 (2011)10.1021/NL1030198 ↗
25. Elers, KE, Blomberg, T, Peussa, M, Aitchison, B, Haukka, S, Marcus, S, “Film uniformity in atomic layer deposition.” Chem. Vap. Depos., 12 (1) 13–24. https://doi.org/10.1002/CVDE.200500024 (2006)10.1002/CVDE.200500024 ↗
26. Choi, B, Kim, HU, Jeon, N, “Uniformity of HfO2 thin films prepared on trench structures via plasma-enhanced atomic layer deposition.” Nanomaterials, 13 (1) 161. https://doi.org/10.3390/NANO13010161/S1 (2023)10.3390/NANO13010161/S1 ↗
27. Panda, A, et al. “Improving high-temperature performance of lithium-rich cathode by roll-to-roll atomic layer deposition of titania nanocoating for lithium-ion batteries.” J. Energy Storage, 44 103348. https://doi.org/10.1016/J.EST.2021.103348 (2021)10.1016/J.EST.2021.103348 ↗
28. Te Hsieh, C, et al. “Roll-to-roll atomic layer deposition of titania nanocoating on thermally stabilizing lithium nickel cobalt manganese oxide cathodes for lithium ion batteries.” ACS Appl. Energy Mater., 3 (11) 10619–10631. https://doi.org/10.1021/ACSAEM.0C01541 (2020)10.1021/ACSAEM.0C01541 ↗
29. Xiang, J, et al. “Alumina nanocoating assisted dispersion stability of permanent violet pigments via atomic layer deposition.” Mater. Chem. Phys., 282 125937. https://doi.org/10.1016/J.MATCHEMPHYS.2022.125937 (2022)10.1016/J.MATCHEMPHYS.2022.125937 ↗
30. Lee, WJ, Wu, YT, Liao, YW, Liu, YT, “Graphite felt modified by atomic layer deposition with TiO2 nanocoating exhibits super-hydrophilicity, low charge-transform resistance, and high electrochemical activity.” Nanomater., 10 (9) 1710. https://doi.org/10.3390/NANO10091710 (2020)10.3390/NANO10091710 ↗
31. Kim, HG, Lee, HBR, “Atomic layer deposition on 2D materials.” Chem. Mater., 29 (9) 3809–3826. https://doi.org/10.1021/ACS.CHEMMATER.6B05103 (2017)10.1021/ACS.CHEMMATER.6B05103 ↗
32. Vos MFJ, Mackus AJM, Kessels WMM, "Atomic layer deposition process development." Atomic Limits, (2019)
33. Tiurin, O, Ein-Eli, Y, “A critical review: The impact of the battery electrode material substrate on the composition and properties of atomic layer deposition (ALD) coatings.” Adv. Mater. Interfaces, 6 (24) 1901455. https://doi.org/10.1002/ADMI.201901455 (2019)10.1002/ADMI.201901455 ↗
34. MacKus, AJM, Verheijen, MA, Leick, N, Bol, AA, Kessels, WMM, “Influence of oxygen exposure on the nucleation of platinum atomic layer deposition: consequences for film growth, nanopatterning, and nanoparticle synthesis.” Chem. Mater., 25 (9) 1905–1911. https://doi.org/10.1021/CM400562U (2013)10.1021/CM400562U ↗
35. Sundaram, GM, Lecordier, L, Bhatia, R, “Vapor phase surface functionalization using atomic layer deposition (ALD) and self assembled molecules (SAMs).” ECS Trans., 58 (10) 27–37. https://doi.org/10.1149/05810.0027ECST/XML (2013)10.1149/05810.0027ECST/XML ↗
36. Junsic, H, Porter, DW, Sreenivasan, R, McIntyre, PC, Bent, SF, “ALD resist formed by vapor-deposited self-assembled monolayers.” Langmuir, 23 (3) 1160–1165. https://doi.org/10.1021/LA0606401 (2007)10.1021/LA0606401 ↗
37. Fickenscher, G, Sidorenko, N, Mikulinskaya, K, Libuda, J, “Different nucleation mechanisms during atomic layer deposition of HfS2 on cobalt oxide surfaces.” Adv. Mater. Interfaces., https://doi.org/10.1002/ADMI.202400371 (2024)10.1002/ADMI.202400371 ↗
38. Choi, Y, et al. “Molecular mechanism of selective Al2O3 Atomic layer deposition on self-assembled monolayers.” ACS Appl. Mater. Interfaces, 15 (34) 41170–41179. https://doi.org/10.1021/ACSAMI.3C09529/ASSET/IMAGES/LARGE/AM3C09529_0006.JPEG (2023)10.1021/ACSAMI.3C09529/ASSET/IMAGES/LARGE/AM3C09529_0006.JPEG ↗
39. Yarbrough, J, Shearer, AB, Bent, SF, “Next generation nanopatterning using small molecule inhibitors for area-selective atomic layer deposition.” J. Vac. Sci. Technol. A, 39 (2) 21002. https://doi.org/10.1116/6.0000840/397301 (2021)10.1116/6.0000840/397301 ↗
40. Qiu, C, Jiang, L, Gao, Y, Sheng, L, “Effects of oxygen-containing functional groups on carbon materials in supercapacitors: A review.” Mater. Des., 230 111952. https://doi.org/10.1016/J.MATDES.2023.111952 (2023)10.1016/J.MATDES.2023.111952 ↗
41. Härkönen, E, et al. “Hydrogen–argon plasma pre-treatment for improving the anti-corrosion properties of thin Al2O3 films deposited using atomic layer deposition on steel.” Thin Solid Films, 534 384–393. https://doi.org/10.1016/J.TSF.2013.03.022 (2013)10.1016/J.TSF.2013.03.022 ↗
42. Guo, L, Zaera, F, “Spatial resolution in thin film deposition on silicon surfaces by combining silylation and UV/ozonolysis.” Nanotechnology, 25 (50) 504006. https://doi.org/10.1088/0957-4484/25/50/504006 (2014)10.1088/0957-4484/25/50/504006 ↗
43. Cao, YQ, Cao, ZY, Li, X, Wu, D, Li, AD, “A facile way to deposit conformal Al2O3 thin film on pristine graphene by atomic layer deposition.” Appl. Surf. Sci., 291 78–82. https://doi.org/10.1016/J.APSUSC.2013.10.133 (2014)10.1016/J.APSUSC.2013.10.133 ↗
44. Muñoz-Rojas, D, Nguyen, VH, Masse de la Huerta, C, Aghazadehchors, S, Jiménez, C, Bellet, D, “Spatial atomic layer deposition (SALD), an emerging tool for energy materials. Application to new-generation photovoltaic devices and transparent conductive materials.” Comptes Rendus Phys., 18 (7–8) 391–400. https://doi.org/10.1016/J.CRHY.2017.09.004/ (2017)10.1016/J.CRHY.2017.09.004/ ↗
45. Penley, D, et al. “mechatronic spatial atomic layer deposition for closed-loop and customizable process control.” Adv. Mater. Technol., 9 (8) 2301728. https://doi.org/10.1002/ADMT.202301728 (2024)10.1002/ADMT.202301728 ↗
46. Poodt, P, et al. “Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition.” J. Vac. Sci. Technol. A, 30 (1) 28. https://doi.org/10.1116/1.3670745/100584 (2012)10.1116/1.3670745/100584 ↗
47. de la Huerta, CM, Nguyen, VH, Dedulle, JM, Bellet, D, Jiménez, C, Muñoz-Rojas, D, “Influence of the geometric parameters on the deposition mode in spatial atomic layer deposition: A novel approach to area-selective deposition.” Coatings, 9 (1) 5. https://doi.org/10.3390/COATINGS9010005 (2019)10.3390/COATINGS9010005 ↗
48. Poodt, P, van Lieshout, J, Illiberi, A, Knaapen, R, Roozeboom, F, van Asten, A, “On the kinetics of spatial atomic layer deposition.” J. Vac. Sci. Technol. A, 31 (1) 1–108. https://doi.org/10.1116/1.4756692/246237 (2013)10.1116/1.4756692/246237 ↗
49. Asgarimoghaddam, H, et al. “Spatial atomic layer deposition of nitrogen-doped alumina thin films for high-performance perovskite solar cell encapsulation.” Nano Energy, 127 109782. https://doi.org/10.1016/J.NANOEN.2024.109782 (2024)10.1016/J.NANOEN.2024.109782 ↗
50. Hoang, V-T, et al. “Enhancing control in spatial atomic layer deposition: insights into precursor diffusion, geometric parameters, and CVD mitigation strategies.” Nanotechnology, 35 (20) 205601. https://doi.org/10.1088/1361-6528/AD28D6 (2024)10.1088/1361-6528/AD28D6 ↗
51. Weber, M, Julbe, A, Ayral, A, Miele, P, Bechelany, M, “Atomic layer deposition for membranes: basics, challenges, and opportunities.” Chem. Mater., 30 (21) 7368–7390. https://doi.org/10.1021/ACS.CHEMMATER.8B02687 (2018)10.1021/ACS.CHEMMATER.8B02687 ↗
52. Liu, M, Li, X, Karuturi, SK, Tok, AIY, Fan, HJ, “Atomic layer deposition for nanofabrication and interface engineering.” Nanoscale, 4 (5) 1522–1528. https://doi.org/10.1039/C2NR11875K (2012)10.1039/C2NR11875K ↗
53. Boryło, P, Szindler, M, Lukaszkowicz, K, “Various applications of multifunctional thin films with specific properties deposited by the ALD method.” Solid State Phenom., 293 111–123. https://doi.org/10.4028/WWW.SCIENTIFIC.NET/SSP.293.111 (2019)10.4028/WWW.SCIENTIFIC.NET/SSP.293.111 ↗
54. Brozena, AH, Oldham, CJ, Parsons, GN, “Atomic layer deposition on polymer fibers and fabrics for multifunctional and electronic textiles.” J. Vac. Sci. Technol. A, 34 (1) 48. https://doi.org/10.1116/1.4938104 (2016)10.1116/1.4938104 ↗
55. Santinacci, L, “Atomic layer deposition: An efficient tool for corrosion protection.” Curr. Opin. Colloid Interface Sci., 63 101674. https://doi.org/10.1016/J.COCIS.2022.101674 (2023)10.1016/J.COCIS.2022.101674 ↗
56. Saha, S, Mukherjee, R, Diwekar, UM, Takoudis, C, “Multi-objective optimization for inherently selective atomic layer deposition of zirconia on silicon and not on copper.” Chem. Eng. Res. Des., 196 483–494. https://doi.org/10.1016/J.CHERD.2023.06.057 (2023)10.1016/J.CHERD.2023.06.057 ↗
57. Saha, S, Phakatkar, AH, Jursich, G, Shokuhfar, T, Takoudis, CG, “The interface of atomic layer deposited ZrO2 on Si/SiO2 from an alkoxide zirconium precursor and ethanol: A transmission electron microscopy-focused study.” Surf. Interface Anal., 55 (8) 638–643. https://doi.org/10.1002/SIA.7211 (2023)10.1002/SIA.7211 ↗
58. Shan, CX, Hou, X, Choy, KL, “Corrosion resistance of TiO2 films grown on stainless steel by atomic layer deposition.” Surf. Coat. Technol., 202 (11) 2399–2402. https://doi.org/10.1016/J.SURFCOAT.2007.08.066 (2008)10.1016/J.SURFCOAT.2007.08.066 ↗
59. Díaz, B, et al. “Low-temperature atomic layer deposition of Al2O3 thin coatings for corrosion protection of steel: Surface and electrochemical analysis.” Corros. Sci., 53 (6) 2168–2175. https://doi.org/10.1016/J.CORSCI.2011.02.036 (2011)10.1016/J.CORSCI.2011.02.036 ↗
60. Abdulagatov, AI, et al. “Al2O3 and TiO2 atomic layer deposition on copper for water corrosion resistance.” ACS Appl. Mater. Interfaces, 3 (12) 4593–4601. https://doi.org/10.1021/AM2009579 (2011)10.1021/AM2009579 ↗
61. Yang, X, et al. “Protein-activated atomic layer deposition for robust crude-oil-repellent hierarchical nano-armored membranes.” Sci. Bull., 69 (2) 218–226. https://doi.org/10.1016/J.SCIB.2023.12.001 (2024)10.1016/J.SCIB.2023.12.001 ↗
62. Van Ngoc, TT, Kim, C, Lee, H, Kim, J, Shong, B, “Machine learning-based exploration of molecular design descriptors for area-selective atomic layer deposition (AS-ALD) precursors.” J. Mol. Model., 30 (1) 1–10. https://doi.org/10.1007/S00894-023-05806-Y/FIGURES/7 (2024)10.1007/S00894-023-05806-Y/FIGURES/7 ↗
63. Liu, H, “Recent progress in atomic layer deposition of multifunctional oxides and two-dimensional transition metal dichalcogenides.” J. Mol. Eng. Mater., 04 (04) 1640010. https://doi.org/10.1142/S2251237316400104 (2017)10.1142/S2251237316400104 ↗
64. JarmoMaula, JM, “Atomic layer deposition for industrial optical coatings.” Chin. Opt. Lett., 8 (S1) 53–58. https://doi.org/10.3788/COL201008S1.0053 (2010)10.3788/COL201008S1.0053 ↗
65. Shahmohammadi, M, Mukherjee, R, Sukotjo, C, Diwekar, UM, Takoudis, CG, “Recent advances in theoretical development of thermal atomic layer deposition: A review.” Nanomater., 12 (5) 831. https://doi.org/10.3390/NANO12050831 (2022)10.3390/NANO12050831 ↗
66. Mane, AU, Elam, JW, “Nanocomposite coatings by ALD: In-situ growth investigation and applications.” Proc. SPIE, 9929 158–158. https://doi.org/10.1117/12.2237810 (2016)10.1117/12.2237810 ↗
67. Chen, M, Nijboer, MP, Kovalgin, AY, Nijmeijer, A, Roozeboom, F, Luiten-Olieman, MWJ, “Atmospheric-pressure atomic layer deposition: Recent applications and new emerging applications in high-porosity/3D materials.” Dalt. Trans., 52 (30) 10254–10277. https://doi.org/10.1039/D3DT01204B (2023)10.1039/D3DT01204B ↗
68. Forge Nano, “What is particle atomic layer deposition (PALD)?" Forge Nano(Accessed Sep. 25, 2024).
69. Nazarov, D, Kozlova, L, Rogacheva, E, Kraeva, L, Maximov, M, “Atomic layer deposition of antibacterial nanocoatings: A review.” Antibiotics, 12 (12) 1656. https://doi.org/10.3390/ANTIBIOTICS12121656/S1 (2023)10.3390/ANTIBIOTICS12121656/S1 ↗
70. Skoog, SA, Elam, JW, Narayan, RJ, “Atomic layer deposition: Medical and biological applications.” Int. Mater. Rev., 58 (2) 113–129. https://doi.org/10.1179/1743280412Y.0000000009 (2013)10.1179/1743280412Y.0000000009 ↗
71. Pessoa, RS, Fraga, MA, “Biomedical applications of ultrathin atomic layer deposited metal oxide films on polymeric materials.” Front. Nanosci., 14 291–307. https://doi.org/10.1016/B978-0-08-102572-7.00011-8 (2019)10.1016/B978-0-08-102572-7.00011-8 ↗
72. Basiaga, M, et al. “Atomic layer deposited ZnO films on stainless steel for biomedical applications.” Arch. Civ. Mech. Eng., 21 (1) 1–15. https://doi.org/10.1007/S43452-020-00148-5/FIGURES/14 (2021)10.1007/S43452-020-00148-5/FIGURES/14 ↗
73. Kvalvik, JN, Bioactive surfaces with atomic layer deposition. University of OSLO, Oslo (2015)
74. Smieszek, A, et al. “Titanium dioxide thin films obtained by atomic layer deposition promotes osteoblasts’ viability and differentiation potential while inhibiting osteoclast activity—potential application for osteoporotic bone regeneration.” Mater., 13 (21) 4817. https://doi.org/10.3390/MA13214817 (2020)10.3390/MA13214817 ↗
75. Erturk, PA, Altuntas, S, Irmak, G, Buyukserin, F, “Fabrication of anodic and atomic layer deposition-alumina coated titanium implants for effective osteointegration applications.” J. Biomed. Mater. Res. Part A, https://doi.org/10.1002/JBM.A.37792 (2024)10.1002/JBM.A.37792 ↗
76. Saha, S, et al. “Collagen membrane functionalized with magnesium oxide via room-temperature atomic layer deposition promotes osteopromotive and antimicrobial properties.” Bioact. Mater., 30 46–61. https://doi.org/10.1016/J.BIOACTMAT.2023.07.013 (2023)10.1016/J.BIOACTMAT.2023.07.013 ↗
77. Faverani, LP, et al. “Collagen membranes functionalized with 150 cycles of atomic layer deposited titania improve osteopromotive property in critical-size defects created on rat calvaria.” J. Funct. Biomater., 14 (3) 120. https://doi.org/10.3390/JFB14030120 (2023)10.3390/JFB14030120 ↗
78. Astaneh, SH, et al., "Functionalization of collagen fiber with nano-islands of silver via atomic layer deposition promotes bone healing." https://doi.org/10.2139/SSRN.4580225.10.2139/SSRN.4580225 ↗
79. Brzeska J, Janik H, Kowalczuk M, Rutkowska M, "The properties of polyurethanes based on synthetic polyhydroxybutyrate for medical application." (2012)
80. Ulery, BD, Nair, LS, Laurencin, CT, “Biomedical applications of biodegradable polymers.” J. Polym. Sci. Part B Polym. Phys., 49 (12) 832–864. https://doi.org/10.1002/polb.22259 (2011)10.1002/polb.22259 ↗
81. Giosafatto, L, et al. “Biodegradable polymers in biomedical applications: A review—developments, perspectives and future challenges.” Int. J. Mol. Sci., 24 (23) 16952. https://doi.org/10.3390/IJMS242316952 (2023)10.3390/IJMS242316952 ↗
82. Pessoa, RS, et al. “TiO2 coatings via atomic layer deposition on polyurethane and polydimethylsiloxane substrates: Properties and effects on C. Albicans growth and inactivation process.” Appl. Surf. Sci., 422 73–84. https://doi.org/10.1016/J.APSUSC.2017.05.254 (2017)10.1016/J.APSUSC.2017.05.254 ↗
83. Li, T, Synthesis and characterizations of antimicrobial coating by atomic layer deposition technique for personal protective equipment applications. University of British Columbia, Vancouver (2022)
84. Yang, Q, et al. “Atomic layer deposited ZrO2 nanofilm on Mg-Sr alloy for enhanced corrosion resistance and biocompatibility.” Acta Biomater., 58 515–526. https://doi.org/10.1016/J.ACTBIO.2017.06.015 (2017)10.1016/J.ACTBIO.2017.06.015 ↗
85. Mishra, S, et al. “Structural properties of thin ZnO films deposited by ALD under O-rich and Zn-rich growth conditions and their relationship with electrical parameters.” Materials, https://doi.org/10.3390/MA14144048/S1 (2021)10.3390/MA14144048/S1 ↗
86. Gao, W, Ota, H, Kiriya, D, Takei, K, Javey, A, “Flexible electronics toward wearable sensing.” Acc. Chem. Res., 52 (3) 523–533. https://doi.org/10.1021/ACS.ACCOUNTS.8B00500 (2019)10.1021/ACS.ACCOUNTS.8B00500 ↗
87. Liu, MY, et al. “A stretchable tactile sensor based on ALD-prepared conductive composite textile.” Appl. Mater. Today, 37 102099. https://doi.org/10.1016/J.APMT.2024.102099 (2024)10.1016/J.APMT.2024.102099 ↗
88. Liu, C, et al. “Ultraflexible and energy-efficient artificial synapses based on molecular/atomic layer deposited organic-inorganic hybrid thin films.” Adv. Electron. Mater., 9 (2) 2200821. https://doi.org/10.1002/AELM.202200821 (2023)10.1002/AELM.202200821 ↗
89. Hwang, Y, et al. “A bioinspired ultra flexible artificial van der Waals 2D-MoS2 channel/LiSiOx solid electrolyte synapse arrays via laser-lift off process for wearable adaptive neuromorphic computing.” Small Methods, 7 (7) 2201719. https://doi.org/10.1002/SMTD.202201719 (2023)10.1002/SMTD.202201719 ↗
90. Akbari, P, Shafii, MB, “Numerical simulation of an impinging water jet applied to cooling human skin.” Int. Congr. Appl. Lasers Electro-Optics, 2002 (1) 169623. https://doi.org/10.2351/1.5066202 (2018)10.2351/1.5066202 ↗
91. Li, Q, et al. “High-performance ferroelectric field-effect transistors with ultra-thin indium tin oxide channels for flexible and transparent electronics.” Nat. Commun., 15 (1) 1–9. https://doi.org/10.1038/s41467-024-46878-5 (2024)10.1038/s41467-024-46878-5 ↗
92. Kavinkumar, T, Sivagurunathan, AT, Kim, D-H, “Construction of highly transparent, flexible, and robust solid-state symmetric supercapacitors using NiO electrodes roughened by conformal atomic layer deposition.” Appl. Surf. Sci., 616 156453. https://doi.org/10.1016/J.APSUSC.2023.156453 (2023)10.1016/J.APSUSC.2023.156453 ↗
93. Park, J, Pham, HG, Kim, J, Nguyen, QK, Cho, S, Sung, MM, “Highly conductive and flexible transparent hybrid superlattices with gas-barrier properties: Implications in optoelectronics.” Appl. Surf. Sci., 658 159850. https://doi.org/10.1016/J.APSUSC.2024.159850 (2024)10.1016/J.APSUSC.2024.159850 ↗
94. Jeong, SY, et al. “Foldable and washable textile-based OLEDs with a multi-functional near-room-temperature encapsulation layer for smart e-textiles.” NPJ Flex Electron., 5 (1) 1–9. https://doi.org/10.1038/s41528-021-00112-0 (2021)10.1038/s41528-021-00112-0 ↗
95. Weng, Y, Chen, G, Zhou, X, Zhang, Y, Yan, Q, Guo, T, “Stability enhancement and patterning of silver nanowire networks by conformal TiO2 coating for flexible transparent conductive electrodes.” J. Mater. Sci., 58 (47) 17816–17828. https://doi.org/10.1007/S10853-023-09152-5/FIGURES/6 (2023)10.1007/S10853-023-09152-5/FIGURES/6 ↗
96. Zhou, X, et al. “A flexible Hf0.5Zr0.5O2 thin film with highly robust ferroelectricity.” J. Mater., 10 (1) 210–217. https://doi.org/10.1016/J.JMAT.2023.05.010 (2024)10.1016/J.JMAT.2023.05.010 ↗
97. Deshmukh, S, Gao, W, Michalička, J, Pumera, M, “Nanoscopic decoration of multivalent vanadium oxide on laser-induced graphene fibers via atomic layer deposition for flexible gel supercapacitors.” Chem. Eng. J., 480 147895. https://doi.org/10.1016/J.CEJ.2023.147895 (2024)10.1016/J.CEJ.2023.147895 ↗
98. Lee H-B-R, "Surface functionalization for conductivity improvement by metal atomic layer deposition." 2018 IEEE International Interconnect Technology Conference (IITC), pp. 57, (2018). https://doi.org/10.1109/IITC.2018.8430430.10.1109/IITC.2018.8430430 ↗
99. Topno, NR, Sundriyal, P, Bhattacharya, S, “Future of OLEDs technology in wearable textiles.” Smart Innov. Syst. Technol., 134 575–584. https://doi.org/10.1007/978-981-13-5974-3_50 (2019)10.1007/978-981-13-5974-3_50 ↗
100. Demming, A, “ALD–tooling up nanotechnology step by step.” Nanotechnology, https://doi.org/10.1088/0957-4484/27/5/050201 (2016)10.1088/0957-4484/27/5/050201 ↗