article·2017-01-01

蒸着後アルゴン又は水素プラズマ処理後の非晶質シリコン薄膜の界面構造の構造特性評価【Powered by NICT】

Neumueller Alex, Sergeev Oleg, Vehse Martin, Agert Carsten

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OpenAlex topics: Military Technology and Strategies · Legal and Regulatory Analysis · Linguistic, Cultural, and Literary Studies

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