Effects of plasma on excimer lamp based selective activation processes for electroless plating
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Abstract
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Research context
OpenAlex topics: Electrodeposition and Electroless Coatings · Plasma Diagnostics and Applications · Copper Interconnects and Reliability
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References (9)
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9. D.J. Macauley. P.V. Kelly, K.F. Mongey, G.M. Crean, Paper G49, this symposium.