Passivation of shallow donors in GaAs by oxygen plasma exposure
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OpenAlex topics: Semiconductor materials and devices · Semiconductor materials and interfaces · Ion-surface interactions and analysis
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References (20)
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1. Hshieh · J. Appl. Phys. · 1985 · 57 · 465710.1063/1.335323 ↗
2. Thurzo · Phys. Status Solidi · 1987 · 165
3. Mego · Rev. Sci. Instr. · 1986 · 57 · 279810.1063/1.1139046 ↗
4. Sze · 1969
5. Kazior · J. Appl. Phys. · 1983 · 54 · 253310.1063/1.332322 ↗
6. Hshieh · J. Appl. Phys. · 1986 · 59 · 110.1063/1.337045 ↗
7. Thurzo · Semicond. Sci. Technol. · 1987 · 2 · 63610.1088/0268-1242/2/10/002 ↗
8. Werner · 1988
9. He · Appl. Surf. Sci. · 1988 · 33/34 · 103010.1016/0169-4332(88)90412-6 ↗
10. Hasegawa · J. Vac. Sci. Technol. B · 1986 · 4 · 113010.1116/1.583556 ↗
11. Levitskij · Zh. Tekh. Fiz. · 1957 · 27 · 1001
12. Bohdansky · Appl. Phys. · 1980 · 51 · 286110.1063/1.327954 ↗
13. Harper · J. Vac. Sci. Technol. · 1982 · 21 · 73710.1116/1.571820 ↗
14. Vepřek · Thin Solid Films · 1985 · 130 · 13510.1016/0040-6090(85)90303-7 ↗
15. Theunissen · Solid-State Electron. · 1985 · 28 · 41710.1016/0038-1101(85)90102-9 ↗
16. Kreutz · Phys. Status Solidi · 1979 · 68710.1002/pssa.2210560236 ↗
17. Flietner · Phys. Status Solidi · 1985 · 15310.1002/pssa.2210910120 ↗
18. Pearton · 1989 Mater. Sci. Forum · 1989 · 38–41 · 2510.4028/www.scientific.net/MSF.38-41.25 ↗
19. Chevallier · Appl. Phys. Lett. · 1985 · 47 · 10810.1063/1.96284 ↗
20. Short · J. Electrochem. Soc. · 1988 · 135 · 283510.1149/1.2095443 ↗