journal article·1991-12

Passivation of shallow donors in GaAs by oxygen plasma exposure

I. Thurzo, E. Pinčik, L. Harmatha, V. Nágl, M. Gaži

Applied Surface Science· Volume 52· Issue 4
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Abstract

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Research context

OpenAlex topics: Semiconductor materials and devices · Semiconductor materials and interfaces · Ion-surface interactions and analysis

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