Low temperature oxidation of crystalline silicon using excimer laser irradiation

journal article·1989-01

Vishal Nayar, Ian W. Boyd, F.N. Goodall, G. Arthur

Applied Surface Science· Volume 36· Issue 1-4

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Abstract

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OpenAlex topics: Advanced Surface Polishing Techniques · Laser Material Processing Techniques · Thin-Film Transistor Technologies

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1. Boyd · 1987

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10. Foulon · Appl. Phys. A · 1988 · 45 · 36110.1007/BF00617943 ↗

11. Advanced Lithography