Excimer laser recrystallization of amorphous Si films characterized by grazing X-ray diffraction and optical reflectivity
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OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Ion-surface interactions and analysis
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References (9)
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9. Foulon · Appl. Phys. A · 1988 · 45 · 36110.1007/BF00617943 ↗