Contact barrier application of selective CVD-tungsten in a bipolar device
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OpenAlex topics: Semiconductor materials and interfaces · Silicon and Solar Cell Technologies · Semiconductor materials and devices
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References (4)
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1. Stacy · J. Electrochem. Soc. · 1985 · 132 · 44410.1149/1.2113862 ↗
2. Koerner · 1989
3. Yarmoff · J. Appl. Phys. · 1988 · 63 · 521310.1063/1.340382 ↗
4. Lak Park · Thin Solid Films · 1988 · 116 · 3710.1016/0040-6090(88)90364-1 ↗