Improved surface morphology of flow-modulated MOVPE grown AIN on sapphire using thin medium-temperature AIN buffer layer
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: GaN-based semiconductor devices and materials · Metal and Thin Film Mechanics · Acoustic Wave Resonator Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (14)
Show source-provided references
1. Li · Appl. Phys. Lett. · 2003 · 83 · 516310.1063/1.1633965 ↗
2. Tanniyasu · Nature · 2006 · 441 · 32510.1038/nature04760 ↗
3. http://www.ioffe.rssi.ru/SVA/NSM/Semicond/AlN/thermal.html.
4. Zhang · Appl. Phys. Lett. · 2002 · 81 · 439210.1063/1.1528726 ↗
5. Nam · Appl. Phys. Lett. · 2003 · 82 · 169410.1063/1.1559659 ↗
6. Bai · J. Cryst. Growth · 2005 · 282 · 29010.1016/j.jcrysgro.2005.05.023 ↗
7. Paduano · J. Cryst. Growth · 2004 · 261 · 25910.1016/j.jcrysgro.2003.11.017 ↗
8. Jasinski · Appl. Phys. Lett. · 2003 · 83 · 281110.1063/1.1616191 ↗
9. Wu · Appl. Phys. Lett. · 2004 · 84 · 91210.1063/1.1646222 ↗
10. Imura · Jpn. J. Appl. Phys. · 2006 · 45 · 863910.1143/JJAP.45.8639 ↗
11. Shen · Acta Mater. · 2003 · 51 · 489710.1016/S1359-6454(03)00332-X ↗
12. Takeuchi · J. Cryst. Growth · 2007 · 298 · 33610.1016/j.jcrysgro.2006.10.140 ↗
13. Rosazza · Mater. Sci. Eng. A · 2001 · 298 · 3410.1016/S0921-5093(00)01317-4 ↗
14. Taranets · Acta Mater. · 2002 · 50 · 514710.1016/S1359-6454(02)00383-X ↗