journal article·1985-05

Plasma-assisted etching: Ion-assisted surface chemistry

J Coburn

Publisher page

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

Research context

OpenAlex topics: Ion-surface interactions and analysis · Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References

Reference metadata was not supplied for this record.