Mass spectrometric investigation of the KrF laser-induced plasma plume created above an YBaCuO superconducting target: correlation with thickness distribution of deposited thin films
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Research context
OpenAlex topics: Laser-induced spectroscopy and plasma · Atomic and Molecular Physics · Diamond and Carbon-based Materials Research
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References (5)
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2. Girault · Appl. Phys. Lett. · 1989 · 55 · 18210.1063/1.102400 ↗
3. Dietze · Int. J. Mass. Spectrom. Ion Processes · 1988 · 82 · R110.1016/0168-1176(88)80025-9 ↗
4. Venkatesan · Appl. Phys. Lett. · 1988 · 52 · 1410.1063/1.99673 ↗
5. Sajjadi · Appl. Surf. Sci. · 1990 · 46 · 8410.1016/0169-4332(90)90124-I ↗