Automatically aligned electron beam lithography on the nanometre scale
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Abstract
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Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advancements in Photolithography Techniques · Surface and Thin Film Phenomena
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References (11)
Show source-provided references
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11. Hatzakis · IBM J. Res. Dev. · 1988 · 3210.1147/rd.324.0441 ↗