DataVXApplied Surface SciencePaper
journal article·1996-04

Plasma parameters in pulsed laser-plasma deposition of thin films

S. Metev, M. Ozegowski, G. Sepold, S. Burmester

Applied Surface Science· Volume 96-98
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Bibliographic record

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

Materials processing

OpenAlex topics: Metal and Thin Film Mechanics · Plasma Diagnostics and Applications · Advanced Sensor Technologies Research

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References (6)

Show source-provided references
1. 1994
2. Metev · 1994 · 203
3. Geohegan · 1994
4. Sauerbrey · Z. Phys. · 1959 · 155 · 20610.1007/BF01337937 ↗
5. Ageev · Izv. VUZ-ov Ser. Fiz. · 1977 · 11 · 34
6. D.C. Smith and R.G. Meyerand, Jr., in: Priciples of Laser Plasmas, Ed. G. Bekefi (Wiley, New York).