Analysis of Auger sputter depth profiles with a resolution function
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Abstract
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Semiconductor materials and devices · Optical Coatings and Gratings
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References (3)
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1. Jansson · 1984
2. Logistic function data analysis program
3. Hofmann · Surf. Interf. Anal. · 1994 · 673 · 21