journal article·1998-09

Structure of nitride film hard coatings prepared by reactive magnetron sputtering

R. Manaila, D. Biro, A. Devenyi, D. Fratiloiu, R. Popescu, J.E. Totolici

Applied Surface Science· Volume 134· Issue 1-4
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Abstract

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Research context

OpenAlex topics: Metal and Thin Film Mechanics · GaN-based semiconductor devices and materials · Diamond and Carbon-based Materials Research

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References (25)

Show source-provided references
1. Ikeda · Thin Solid Films · 1991 · 195 · 9910.1016/0040-6090(91)90262-V ↗
2. Wittmer · J. Appl. Phys. · 1981 · 52 · 665910.1063/1.328659 ↗
3. McIntyre · J. Appl. Phys. · 1990 · 67 · 154210.1063/1.345664 ↗
4. Tanaka · Thin Solid Films · 1993 · 228 · 23810.1016/0040-6090(93)90607-Q ↗
5. Veprek · Thin Solid Films · 1985 · 130 · 13510.1016/0040-6090(85)90303-7 ↗
6. Powder Diffraction File, JCPDC International Center for Powder Diffraction Data, Swarthmore, PA, 1989, TiN (6–642); TiN0.9 (31–1403); ZrN (35–753).
7. Manaila · Appl. Surf. Sci. · 1995 · 91 · 29510.1016/0169-4332(95)00134-4 ↗
8. Perry · Thin Solid Films · 1989 · 170 · 6310.1016/0040-6090(89)90622-6 ↗
9. Panjan · Thin Solid Films · 1993 · 228 · 23310.1016/0040-6090(93)90606-P ↗
10. Fillit · Surf. Coat. Technol. · 1988 · 36 · 64710.1016/0257-8972(88)90006-0 ↗
11. Nagakura · J. Appl. Cryst. · 1975 · 8 · 6510.1107/S0021889875009545 ↗
12. Kuzel · Thin Solid Films · 1994 · 247 · 6410.1016/0040-6090(94)90477-4 ↗
13. Cerny · Surf. Coat. Technol. · 1994 · 64 · 11110.1016/S0257-8972(09)90011-1 ↗
14. Cerny · Thin Solid Films · 1990 · 193/194 · 40110.1016/S0040-6090(05)80050-1 ↗
15. Cerny · Thin Solid Films · 1995 · 268 · 7210.1016/0040-6090(95)06694-2 ↗
16. Maheo · Thin Solid Films · 1992 · 215 · 810.1016/0040-6090(92)90693-6 ↗
17. Tanaka · J. Vac. Sci. Technol. A · 1992 · 10 · 174910.1116/1.577742 ↗
18. Wahlström · Thin Solid Films · 1993 · 235 · 6210.1016/0040-6090(93)90244-J ↗
19. Hultman · Thin Solid Films · 1991 · 205 · 15310.1016/0040-6090(91)90297-B ↗
20. Hakansson · Thin Solid Films · 1987 · 153 · 5510.1016/0040-6090(87)90169-6 ↗
21. Zhao · J. Phys. D: Appl. Phys. · 1997 · 30 · 510.1088/0022-3727/30/1/002 ↗
22. Itoh · J. Vac. Sci. Technol. B · 1991 · 9 · 14910.1116/1.585277 ↗
23. Lee · J. Appl. Phys. · 1996 · 80 · 146910.1063/1.363015 ↗
24. Ristolainen · J. Vac. Sci. Technol. A · 1987 · 5 · 218410.1116/1.574950 ↗
25. Johansson · Appl. Phys. Lett. · 1984 · 44 · 67010.1063/1.94871 ↗