journal article·1994-05

Digital etching by using a laser beam: on the control of digital etching products

M. Ishii, T. Meguro, T. Sugano, K. Gamo, Y. Aoyagi

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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Semiconductor Quantum Structures and Devices · Laser Design and Applications · Semiconductor Lasers and Optical Devices

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References (12)

Show source-provided references
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2. Meguro · Jpn. J. Appl. Phys. · 1990 · 29 · 221610.1143/JJAP.29.2216 ↗
3. Meguro · Mater. Res. Soc. Symp. Proc. · 1991 · 222 · 12010.1557/PROC-222-121 ↗
4. Ishii · Jpn. J. Appl. Phys. · 1992 · 31 · 221210.1143/JJAP.31.2212 ↗
5. Ishii · Jpn. J. Appl. Phys. · 1993 · 32 · 617810.1143/JJAP.32.6178 ↗
6. Aoyagi · Appl. Phys. Lett. · 1992 · 60 · 96810.1063/1.106477 ↗
7. French · J. Phys. (Cond. Matter) · 1991 · 3 · S35110.1088/0953-8984/3/S/054 ↗
8. Ludviksson · Surf. Sci. · 1992 · 277 · 28210.1016/0039-6028(92)90769-3 ↗
9. Meguro · Opt. Lett. · 1994 · 19 · 10210.1364/OL.19.000102 ↗
10. 1986
11. Mokler · J. Vac. Sci. Technol. B · 1992 · 10 · 237110.1116/1.586070 ↗
12. Kagakubinran · 1984