Large scale two-step selective aluminum CVD on laser patterned palladium lines
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OpenAlex topics: Copper Interconnects and Reliability · Metal and Thin Film Mechanics · Semiconductor materials and devices
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References (7)
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6. Shinzawa · 1990 · V · 377
7. Haba · Jpn. Soc. Appl. Phys. · 1992 · 2 · 568